Author Affiliations
1 School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun, Jilin 130022, China2 School of Physics, Northeast Normal University, Changchun, Jilin 130024, Chinashow less
Fig. 1. Diffraction principle of photographic encoder grating signal. (a) Schematic of the head of an encoder; (b) propagation of light diffraction
Fig. 2. Fraunhofer diffraction intensity distribution of rectangular grating
Fig. 3. Optical design principle of sine holographic grating
Fig. 4. Diffraction pattern of holographic grating and spatial frequency detection
Fig. 5. Fraunhofer diffraction pattern of holographic grating
Fig. 6. Spatial filtering principle of grating
Fig. 7. Fraunhofer diffraction pattern of filtered holographic gratings
Fig. 8. Optical system principle of grating test using parallel light
Fig. 9. Optical system for testing grating using point light
Fig. 10. Fringe images of multi-beam interferometry holographic grating with spatial frequency of 100 lp/mm before and after filtering imaging processing. (a) Before filtering; (b) after filtering
Fig. 11. Transmittance functions of multi-beam interferometry holographic grating with spatial frequency of 100 lp/mm before and after filtering imaging processing. (a) Before filtering; (b) after filtering
Fig. 12. Frequency spectra of multi-beam interferometry holographic grating with spatial frequency of 100 lp/mm before and after filtering imaging processing. (a) Before filtering; (b) after filtering
Fig. 13. Diffraction light intensity distributions of multi-beam interferometry holographic grating with spatial frequency of 100 lp/mm before and after filtering imaging processing. (a) Before filtering; (b) after filtering
Fig. 14. Frequency spectra of rectangular grating with spatial frequency of 100 lp/mm before and after filtering. (a) Before filtering; (b) after filtering
Fig. 15. Diffraction light intensity distribution of rectangular grating with spatial frequency of 100 lp/mm
Fig. 16. Diffraction light intensity distributions of rectangular grating with spatial frequency of 100 lp/mm after spatial filtering imaging processing. (a) Light intensity of -1 level and 0 level; (b) light intensity of 0 level and +1 level
Method | Advantage | Disadvantage |
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Fresnel double sided mirror and biprism | 1) Fewer components;2) Symmetrical optical system and the optical path difference is almost zero;3) The range of the grating constant is wide | 1) The light spot of interference area is small when using collimating lens;2) Two light beams are non-parallel without collimating lens | Lloyd mirror method | 1) Fewer components and no secondary images;2) Simple operation and convenient adjustment | 1) Relatively high requirements for the reflectivity of the reflector, collimation property of two light beams and the intensity ratio;2) Only suitable for the fabrication of gratings with larger constant and smaller spatial frequency;3) The interferential light beams are not strictly parallel | Michelson interferometry method | 1) Larger size of the grating fabricated;2) Two-dimensional grating fabricated by one exposure | 1) More transmissive components, so that the wave surface of the plane wave will be deformed and deviate from the plane wave;2) Only suitable for the fabrication of gratings with larger constant | Mach-Zehnder interferometry method | 1) Symmetrical optical system and convenient to set up;2) The optical path difference of two light beams is small and the interference effect is good;3) The adjustment is convenient and the spatial frequency of gratings can be changed with the adjustment of one beam splitter angle | 1) More optical components and the fringe is uneven and the symmetry property is decreased;2) The angle between the reflected light and the transmissive light is small and the grating constant is not accurate;3) The angle of two light beams is restricted by the area of beam splitter and this method is not suitable for the fabrication of gratings with small constant |
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Table 1. Advantages and disadvantages of sine grating fabrication method
/(lp·mm-1) | 50 | 100 | 120 | 150 |
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/cm | 0.791 | 1.582 | 1.898 | 2.373 |
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Table 2. Relationship between d0 and f0
f″0 /(lp·mm-1) | 50 | 100 | 120 | 150 |
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p /cm | 1.265 | 2.531 | 3.037 | 3.797 |
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Table 3. Relationship between f″0 and p
f″ /(lp·mm-1) | 50 | 100 | 120 | 150 |
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p /cm | 2.530 | 5.065 | 6.075 | 7.600 | f″ /(lp·mm-1) | 100 | 200 | 240 | 300 |
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Table 4. Relationship among f″0, f″1, and p
| | p100 | |
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100 | 5.3850 | 0.0539 | | 110 | 5.6617 | 0.0515 | | 120 | 6.3600 | 0.0530 | | 130 | 6.8419 | 0.0526 | | 140 | 7.3262 | 0.0523 | | 150 | 7.3800 | 0.0492 | 0.0527 | 160 | 8.2240 | 0.0514 | | 170 | 8.8315 | 0.0520 | | 180 | 9.6426 | 0.0536 | | 190 | 9.8705 | 0.0520 | | 200 | 11.6800 | 0.0584 | |
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Table 5. Light intensity ratio of ±2 level to ±1 level of grating with spatial frequency of 100 lp/mm
Spatial frequency /(lp·mm-1) | 50 | 100 | 120 | 150 |
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Light intensity ratio /% | 8.59 | 5.27 | 3.50 | 2.48 |
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Table 6. Light intensity ratio of ±2 level to ±1 level of each grating