The Relation between Residual Error and the Number of Measurements in the Random Ball Test

LU Li-ming; WU Fan; HOU Xi; LI Liang-hong

doi:10.3969/j.issn.1003-501x.2012.03.015

Journals >Opto-Electronic Engineering >Volume 39 >Issue 3 >Page 83 > Article

Opto-Electronic Engineering
Vol. 39, Issue 3, 83 (2012)

The Relation between Residual Error and the Number of Measurements in the Random Ball Test

LU Li-ming^1、2、*, WU Fan¹, HOU Xi¹, and LI Liang-hong¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

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DOI: 10.3969/j.issn.1003-501x.2012.03.015 Cite this Article

LU Li-ming, WU Fan, HOU Xi, LI Liang-hong. The Relation between Residual Error and the Number of Measurements in the Random Ball Test[J]. Opto-Electronic Engineering, 2012, 39(3): 83 Copy Citation Text

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References

[1] Ulf Griesmann，Quandou Wang，Johannes Soons，et al. A Simple Ball Averager for Reference Sphere Calibrations [J]. Pro. of SPIE(S0277-786X)，2005，5869：58690S-1-8.

[2] XING Ting-wen，HE Guo-liang，SHU Liang. Measurement Errors in the 193 nm Phase-shifting Point Diffraction Interferometer[J]. Opto-Electronic Engineering，2009，36(2)：67-72.

[3] MA Dong-mei，CHEN Tu-quan. Test and evaluation of wavefront phase of point diffraction [J]. Optics and Precision Engineering，2010，18(11)：2390-2397.

[4] ZHOU Ping，Burge James H. Limits for interferometer calibration using the random ball test [J]. Pro. of SPIE(S0277-786X)，2009，7426：74260U-1O-12.

[5] Katherine Creath，Wyant James C. Absolute measurement of surface roughness [J]. Applied Optics(S0003-6935)，1990，29(26)：3823-3827.

[6] Daniel Malacara. Optical Shop Testing：Third Edition [M]. John Wiley & Sons，Inc，2006.

LU Li-ming, WU Fan, HOU Xi, LI Liang-hong. The Relation between Residual Error and the Number of Measurements in the Random Ball Test[J]. Opto-Electronic Engineering, 2012, 39(3): 83

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