[1] Liu Guogan, Zhang Xuejun, Wang Quandou et al.. Fiber point diffraction interferometer[J]. Opt. & Precision Engng., 2001, 9(2): 142~145
[2] G. E. Sommargren, S. W. Phillion, M. A. Johnson et al.. 100-Picometer interferometry for EUVL[C]. SPIE, 2002, 4688: 316~328
[3] Sugisaki Katsumi, Zhu Yucong. Present status of the ASET at-wavelength phase-shifting point diffraction interferometer [C]. SPIE, 2000, 4146: 47~53
[4] Sang Hun Lee, Patrick Naullear, Kenneth A.Goldberg et al.. Phase shifting point diffraction interferometry at 193 nm [J]. Appl. Opt., 2000, 39(31): 5768~5772
[5] Naulleau Patrick, Goldberg Kenneth A.. Dual-domain point diffraction interferometer [J]. Appl. Opt., 1999, 38(16): 3523~3532
[6] Gong Qian, Geary Josehp. Modeling point diffraction interferometers [C]. SPIE, 1995, 2544: 358~375
[9] Deng Xiaojiu, Li Huailong, Liu Caixia et al.. A comparative study of vectorial diffraction theories and the validity of scalar approximation[J]. Chinese J. Quantum Electron., 2007, 24(5): 543~547
[11] K. Otaki, Y. Zhua, M. Ishij et al.. Rigorous wavefront analysis of the visible light point diffraction interferometer for EUVL[C]. SPIE, 2004, 5193: 182~190
[12] Born M., Wolf E.. Principles of Optics[ M] . Yang Jiasun Transl.. Beijing: Electronics Industry Press, 2005. 427~428