Ning Wang, Baiqin Zhao, Shuai Wang, Zhen Wang. Photoelectric monolithic integration of PIN detector and transimpedance amplifier[J]. Infrared and Laser Engineering, 2021, 50(9): 20210076
- Infrared and Laser Engineering
- Vol. 50, Issue 9, 20210076 (2021)
Fig. 1. Structure diagram of laser receiving system
Fig. 2. Structure diagram of amplifier circuit
Fig. 3. Surface structure diagram of PIN detector
Fig. 4. Longitudinal structure diagram of PIN detector
Fig. 5. Schematic diagram of photoelectric monolithic integrated circuit
Fig. 6. Process structure diagram of photoelectric monolithic integration
Fig. 7. PIN detector performance test. （a） I -V curve; (b) C -V curve; (c) Photoelectric response curve
Fig. 8. Real pulse voltage response. (a) PIN detector; (b) Optoelectronic monolithic integrated chip
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