Ning Wang, Baiqin Zhao, Shuai Wang, Zhen Wang. Photoelectric monolithic integration of PIN detector and transimpedance amplifier[J]. Infrared and Laser Engineering, 2021, 50(9): 20210076

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- Infrared and Laser Engineering
- Vol. 50, Issue 9, 20210076 (2021)

Fig. 1. Structure diagram of laser receiving system

Fig. 2. Structure diagram of amplifier circuit

Fig. 3. Surface structure diagram of PIN detector

Fig. 4. Longitudinal structure diagram of PIN detector

Fig. 5. Schematic diagram of photoelectric monolithic integrated circuit

Fig. 6. Process structure diagram of photoelectric monolithic integration

Fig. 7. PIN detector performance test. (a) I -V curve; (b) C -V curve; (c) Photoelectric response curve

Fig. 8. Real pulse voltage response. (a) PIN detector; (b) Optoelectronic monolithic integrated chip

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