Fanglin Xie, Lei Wang, Shengzhou Huang. Research Progress of Maskless Digital Lithography Based on Digital Micromirror Device[J]. Laser & Optoelectronics Progress, 2022, 59(11): 1100010
- Laser & Optoelectronics Progress
- Vol. 59, Issue 11, 1100010 (2022)
Fig. 1. Overall design block diagram of maskless lithography system based on DMD
![Schematic diagram of the DMD structure[6]](/richHtml/lop/2022/59/11/1100010/img_02.jpg)
Fig. 2. Schematic diagram of the DMD structure[6]
![Structure of the DMD-based maskless digital scanning lithography exposure system[7]](/Images/icon/loading.gif){kind=icon}
Fig. 3. Structure of the DMD-based maskless digital scanning lithography exposure system[7]
Fig. 4. DMD maskless lithography system based on oblique scanning[11]
Fig. 5. Schematic diagram of the stepping lithography
Fig. 6. Aspheric microlens. (a) Magnifying image; (b) three-dimensional image of one microlens[32]
Fig. 7. Microlens arrays fabricated under non-vibrational and vibrational projections [36]
Fig. 8. Haversian bone-mimicking scaffolds obtained by 3D printing [41]
Fig. 9. System composition and design. (a) Schematic illustration of the DMD-based optical projection lithography system; (b) amplification of the microfluidic chip; (c) design of the multi-dimensional cell co-culture system [42]
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