• Infrared and Laser Engineering
  • Vol. 54, Issue 5, 20250081 (2025)
Quan LIU1,2, Nenghua ZHOU1,3, Kexin WANG1,2, Zhiwei CHEN1,2..., Zijiang YANG1,2, Qiao PAN1,2 and Xinhua CHEN1,2|Show fewer author(s)
Author Affiliations
  • 1School of Optoelectronic Science and Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215006, China
  • 2Key Lab of Modern Optical Technologies of Education Ministry of China, Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Soochow University, Suzhou 215006, China
  • 3Shanghai Radio Equipment Research Institute, Shanghai 201109, China
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    DOI: 10.3788/IRLA20250081 Cite this Article
    Quan LIU, Nenghua ZHOU, Kexin WANG, Zhiwei CHEN, Zijiang YANG, Qiao PAN, Xinhua CHEN. Highly diffraction-efficient prism gratings for the satellite-borne methane imaging spectrometer(cover paper·invited)[J]. Infrared and Laser Engineering, 2025, 54(5): 20250081 Copy Citation Text show less
    Schematic diagram of rectangular groove grating
    Fig. 1. Schematic diagram of rectangular groove grating
    Relationship among groove depth, TiO2 depth and diffraction efficiency with different duty cycle. (a) f=0.3; (b) f=0.35; (c) f=0.4; (d) f=0.45
    Fig. 2. Relationship among groove depth, TiO2 depth and diffraction efficiency with different duty cycle. (a) f=0.3; (b) f=0.35; (c) f=0.4; (d) f=0.45
    Prism grating manufacturing process flowchart
    Fig. 3. Prism grating manufacturing process flowchart
    SEM of the grating. (a) Etched grating; (b) ALD TiO2
    Fig. 4. SEM of the grating. (a) Etched grating; (b) ALD TiO2
    The prism gratings
    Fig. 5. The prism gratings
    Schematic diagram of experimental measurement of diffraction efficiency
    Fig. 6. Schematic diagram of experimental measurement of diffraction efficiency
    Relationship between diffraction efficiency and wavelength of prism grating
    Fig. 7. Relationship between diffraction efficiency and wavelength of prism grating
    Duty cycleTiO2 depth/nm@ DE≥70%Groove depth/nm@ DE≥70%TiO2 depth/nm@ DE≥80%Groove depth/nm@ DE≥80%
    0.3165-215770-950165-205810-930
    0.35150-200800-970155-195850-950
    0.4140-185800-1030145-175870-1000
    0.45125-170800-1050130-165850-1000
    Table 1. Parameter ranges for the high diffraction efficiency(DE) at different duty cycle
    Wavelength/μm2.2752.2852.32.3152.325
    Diffraction efficiency 75.6%74.9%74.1%73.5%73.1%
    Table 2. Measurement results of diffraction efficiency
    Quan LIU, Nenghua ZHOU, Kexin WANG, Zhiwei CHEN, Zijiang YANG, Qiao PAN, Xinhua CHEN. Highly diffraction-efficient prism gratings for the satellite-borne methane imaging spectrometer(cover paper·invited)[J]. Infrared and Laser Engineering, 2025, 54(5): 20250081
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