Quan LIU, Nenghua ZHOU, Kexin WANG, Zhiwei CHEN, Zijiang YANG, Qiao PAN, Xinhua CHEN. Highly diffraction-efficient prism gratings for the satellite-borne methane imaging spectrometer(cover paper·invited)[J]. Infrared and Laser Engineering, 2025, 54(5): 20250081

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- Infrared and Laser Engineering
- Vol. 54, Issue 5, 20250081 (2025)

Fig. 1. Schematic diagram of rectangular groove grating

Fig. 2. Relationship among groove depth, TiO2 depth and diffraction efficiency with different duty cycle. (a) f =0.3; (b) f =0.35; (c) f =0.4; (d) f =0.45

Fig. 3. Prism grating manufacturing process flowchart

Fig. 4. SEM of the grating. (a) Etched grating; (b) ALD TiO2

Fig. 5. The prism gratings

Fig. 6. Schematic diagram of experimental measurement of diffraction efficiency

Fig. 7. Relationship between diffraction efficiency and wavelength of prism grating
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Table 1. Parameter ranges for the high diffraction efficiency(DE) at different duty cycle
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Table 2. Measurement results of diffraction efficiency

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