Highly diffraction-efficient prism gratings for the satellite-borne methane imaging spectrometer(cover paper&#183;invited)

Quan LIU; Nenghua ZHOU; Kexin WANG; Zhiwei CHEN; Zijiang YANG; Qiao PAN; Xinhua CHEN

doi:10.3788/IRLA20250081

Journals >Infrared and Laser Engineering >Volume 54 >Issue 5 >Page 20250081 > Article

Infrared and Laser Engineering
Vol. 54, Issue 5, 20250081 (2025)

Highly diffraction-efficient prism gratings for the satellite-borne methane imaging spectrometer(cover paper·invited)

Quan LIU^1,2, Nenghua ZHOU^1,3, Kexin WANG^1,2, Zhiwei CHEN^1,2..., Zijiang YANG^1,2, Qiao PAN^1,2 and Xinhua CHEN^1,2|Show fewer author(s)

Author Affiliations

¹School of Optoelectronic Science and Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215006, China

²Key Lab of Modern Optical Technologies of Education Ministry of China, Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Soochow University, Suzhou 215006, China

³Shanghai Radio Equipment Research Institute, Shanghai 201109, China

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DOI: 10.3788/IRLA20250081 Cite this Article

Quan LIU, Nenghua ZHOU, Kexin WANG, Zhiwei CHEN, Zijiang YANG, Qiao PAN, Xinhua CHEN. Highly diffraction-efficient prism gratings for the satellite-borne methane imaging spectrometer(cover paper·invited)[J]. Infrared and Laser Engineering, 2025, 54(5): 20250081 Copy Citation Text

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Fig. 1. Schematic diagram of rectangular groove grating

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$Relationship among groove depth, TiO2 depth and diffraction efficiency with different duty cycle. （a） f=0.3; （b） f=0.35; （c） f=0.4; （d） f=0.45$

Fig. 2. Relationship among groove depth, TiO₂ depth and diffraction efficiency with different duty cycle. （a） f=0.3; （b） f=0.35; （c） f=0.4; （d） f=0.45

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Fig. 3. Prism grating manufacturing process flowchart

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Fig. 4. SEM of the grating. (a) Etched grating; (b) ALD TiO₂

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Fig. 5. The prism gratings

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$Schematic diagram of experimental measurement of diffraction efficiency$

Fig. 6. Schematic diagram of experimental measurement of diffraction efficiency

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$Relationship between diffraction efficiency and wavelength of prism grating$

Fig. 7. Relationship between diffraction efficiency and wavelength of prism grating

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Duty cycle	TiO₂ depth/nm@ DE≥70%	Groove depth/nm@ DE≥70%	TiO₂ depth/nm@ DE≥80%	Groove depth/nm@ DE≥80%
0.3	165-215	770-950	165-205	810-930
0.35	150-200	800-970	155-195	850-950
0.4	140-185	800-1030	145-175	870-1000
0.45	125-170	800-1050	130-165	850-1000