Excimer laser amplification technology can amplify the low-energy deep ultraviolet femtosecond pulse obtained by solid Ti:Sapphire femtosecond laser through frequency conversion into the high-energy deep ultraviolet femtosecond pulse. In order to meet therequirement of synchronization between excimer laser and femtosecond laser, a time-delay synchronization system with low jitter for excimer laser has been designed. The system adopts the method that combines field programmable gate array (FPGA) digital delay and programmable delay chip delay, uses the time measurement chip to achieve the closed-loop control of delay time to improve the stability of the system’s delay output, and finally realize the accurate delay of external trigger pulse signal. The verification experiments show thatthe system operates stably at 1-100 Hz frequency, the delay time range of output pulse signal is 56 ns-2.2 μs, the theoretical delay step is 10 ps, and the jitter is less than ±1 ns, which fully meets the requirement of synchronization between femtosecond laser and excimer laser.