Fabrication and Testing of a Ring Electrostatic Resonator Based on Anode Bonding

WANG Junduo; SHEN Wenjiang

doi:10.13911/j.cnki.1004-3365.210353

[2] SU T H. Approaches for low noise sensing in MEMS disk gyros ［D］. University of California. 2015: 20-21.

[4] EFIMOVSKAYA A, WANG D, LIN Y, et al. On ordering of fundamental wineglass modes in toroidal ring gyroscope ［C］// IEEE Sensors. Orlando, FL, USA. 2016: 1-3.

[5] BRUSCHI P, BUTTI F. Sensors and microsystem ［M］. New York: Springer, 2012.

[7] MAHBOOB I, NISHIGUCHI K, OKAMOTO H, et al. Phonon-cavity electromechanics ［J］. Nature Phys, 2012, 8(6): 387-392.

[8] CHALLONER A D, GE H H, LIU J Y, et al. Boeing disc resonator gyroscope ［C］// IEEE/ION PLANS. Monterey, CA, USA. 2014: 504-514.

[9] LEE E Y, SESHIA A A. Direct parameter extraction in feedthrough-embedded capacitive MEMS resonators ［J］. Sensors Actuators A-Phys, 2011, 167(2): 237-244.

[10] DONG J K, M'CLOSKEY R T. A systematic method for tuning the dynamics of electrostatically actuated vibratory gyros ［J］. IEEE Trans Control Syst Tech, 2006, 14(1): 69-81.

[11] AHN C H, NG E J, HONG V A, et al. Mode-matching of wineglass mode disk resonator gyroscope in (100) single crystal silicon ［J］. J Microelectromechan Syst, 2015, 24(2): 343-350.