The thin film deposition is used to make 16 step Fresnel lens. It can implement system′s lightweight, miniaturization and increase free degree of the design. Based on the scalar theory the effect of surface reflection of the SiO 2 film and substrate on the diffractive efficiency is analyzed by using Fresnel formula and Fourier transform.It is pointed out that the surface reflection has great effect on imaging of Fresnel lens. The coating is used to decrease this effect.