• Laser & Optoelectronics Progress
  • Vol. 58, Issue 23, 2312005 (2021)
Wenying Zhang1、2, Haoran Zhu3、*, and Nan Li1、2
Author Affiliations
  • 1Institute for Interdisciplinary Quantum Information Technology, Jilin Engineering Normal University, Changchun , Jilin 130052, China
  • 2Jilin Engineering Laboratory for Quantum Information Technology, Changchun , Jilin 130052, China
  • 3School of Electronics and Information Engineering, Changchun University of Science and Technology, Changchun , Jilin 130022, China
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    DOI: 10.3788/LOP202158.2312005 Cite this Article Set citation alerts
    Wenying Zhang, Haoran Zhu, Nan Li. Research on Stereo Grating Angle Sensor System[J]. Laser & Optoelectronics Progress, 2021, 58(23): 2312005 Copy Citation Text show less
    References

    [1] Su D F, Xu Z J, Jia J Q et al. Read-head design for improving the precision of circular grating angular measuring system[J]. Journal of Electronic Measurement and Instrument, 27, 653-657(2013).

    [2] Huang Y, Xue Z, Lin H et al. Development of portable and real-time self-calibration angle encoder[J]. Proceedings of SPIE, 9903, 99030F(2016).

    [3] Wang Y, Xue Z, Huang Y et al. Study on self-calibration angle encoder using simulation method[J]. Proceedings of SPIE, 9903, 99032O(2016).

    [4] Zhang R, Huang Q X, Wu T T et al. Research of compensating angle error to the 2D stage in real time[J]. China Measurement & Test, 44, 102-106(2018).

    [5] Cai N, Xie W, Peng H X et al. A novel error compensation method for an absolute optical encoder based on empirical mode decomposition[J]. Mechanical Systems and Signal Processing, 88, 81-88(2017).

    [6] Geckeler R D, Link A, Krause M et al. Capabilities and limitations of the self-calibration of angle encoders[J]. Measurement Science and Technology, 25, 055003(2014).

    [7] Watanabe T, Kondo Y, Fujimoto H. Evaluation of dynamic spindle run out ability of self-calibratable rotary encoder[C](2014).

    [8] Huang Y, Xue Z, Wang H Y. Comparison between angle interferometer and angle encoder during calibration of autocollimator[J]. Proceedings of SPIE, 9446, 944624(2015).

    [9] Ren X, Du S P, Chen K et al. Error source and spectrum analysis for angle measurement of circular grating encoder[J]. Laser & Optoelectronics Progress, 57, 171205(2020).

    [10] Huang L, Pan N, Ma W L et al. Error analysis and experimentation of scale tape encoder[J]. Chinese Optics, 8, 464-470(2015).

    [11] Ai C G, Chu M, Sun H X et al. Eccentric testing of benchmark circular grating and compensation of angular error[J]. Optics and Precision Engineering, 20, 2479-2484(2012).

    [12] Guo Y K, Li Y H, Li Q X et al. Error compensation for eccentric motions of circular gratings[J]. Journal of Tsinghua University (Science and Technology), 45, 178-181(2005).

    [13] Wang Y. The installation eccentricity error measurement and compensation technique for circular grating[D](2018).

    [14] Zhai Z S, Cheng Z, Zhang Y H et al. Optical analysis of moiré fringes of concentric-circle gratings[J]. Laser & Optoelectronics Progress, 55, 070501(2018).

    [15] Zhang W Y, Lao D B, Zhou W H et al. Suppression method for angle measurement error of mixing-layout multiple reading head[J]. Optics and Precision Engineering, 25, 2339-2346(2017).

    Wenying Zhang, Haoran Zhu, Nan Li. Research on Stereo Grating Angle Sensor System[J]. Laser & Optoelectronics Progress, 2021, 58(23): 2312005
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