• Microelectronics
  • Vol. 51, Issue 6, 894 (2021)
HAN Lulu1、2、3、4, WU Qiannan1、3、4、5, YU Jiangang1、2、3、4, WANG Shanshan1、2、3、4, WANG Yu1、2、3、4, and LI Mengwei1、2、3、4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
  • 5[in Chinese]
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    DOI: 10.13911/j.cnki.1004-3365.210081 Cite this Article
    HAN Lulu, WU Qiannan, YU Jiangang, WANG Shanshan, WANG Yu, LI Mengwei. Design of a K~D Band Broadband RF MEMS Switch[J]. Microelectronics, 2021, 51(6): 894 Copy Citation Text show less
    References

    [4] LI M, ZHANG Y, ZHAO Y, et al. Design and fabrication of a 4-bit RF MEMS attenuator with a high attenuation accuracy [J]. Analog Integr Circ Signal Process, 2020, 102(7): 617-624.

    [6] ZHANG N B, MEI L R, WANG C T, et al. A switchable bandpass filter employing RF MEMS switches and open-ring resonators [J]. IEEE Trans Elec Dev, 2017, 64(1):3377-3383.

    [7] LU D, YU M, BARKER N S, et al. A simple and general method for filtering power divider with frequency fixed and frequency-tunable fully canonical filtering response demonstrations [J]. IEEE Trans Microwave Theo Tech, 2019, 67(5): 1812-1825.

    [8] LI M W, LIU Q H, WU Q N, et al. Broadband radio frequency MEMS series contact switch with low insertion loss [J]. Microsyst Tech, 2019, 25(5): 1619-1625.

    [9] DEMIREL K, YAZGAN E, DEMIR S, et al. A new temperature-tolerant RF MEMS switch structure design and fabrication for Ka-band applications [J]. J Microelectromechan Syst, 2016, 25(1): 60-68.

    [11] MOLAEI S, GANJI B A. Design and simulation of a novel RF MEMS shunt capacitive switch with low actuation voltage and high isolation [J]. Microsyst Tech, 2017, 23(6): 1907-1912.

    [12] YOUNIS S, SALEEM M M, ZUBAIR M, et al. Multiphysics design optimization of RF-MEMS switch using response surface methodology [J]. Microelec J, 2017, 71(1): 47-60.

    [13] XU Y, TIAN Y, ZHANG B, et al.A novel RF MEMS switch on frequency reconfigurable antenna application [J]. Microsyst Tech, 2018, 24(4): 1-9.

    [17] CHU C L, LIAO X P. 1-40 GHz ultra-wideband RF MEMS direct-contact switch based on GaAs MMIC technique [J]. IET Microwaves Antennas Propag, 2018, 12(6): 879-884.

    HAN Lulu, WU Qiannan, YU Jiangang, WANG Shanshan, WANG Yu, LI Mengwei. Design of a K~D Band Broadband RF MEMS Switch[J]. Microelectronics, 2021, 51(6): 894
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