• Chinese Journal of Lasers
  • Vol. 42, Issue 5, 508004 (2015)
Lu Binghui*, Liu Guodong, Sun Heyi, Liu Bingguo, and Chen Fengdong
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  • [in Chinese]
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    DOI: 10.3788/cjl201542.0508004 Cite this Article Set citation alerts
    Lu Binghui, Liu Guodong, Sun Heyi, Liu Bingguo, Chen Fengdong. Phase Extraction Method of Microsphere Interferometry Based on Error Complementary Correction[J]. Chinese Journal of Lasers, 2015, 42(5): 508004 Copy Citation Text show less

    Abstract

    In order to measure the surface topography of microsphere with phase-shifting interferometer in high precision, phase extraction method is of great important. But there is always linear phase shifting error existence coming from system calibration error or defocus, which influences the phase extracting accuracy. The common phase shifting algorithms are not quite suitable for the measurement of sphere, especially when the linear error is larger, so a new five frames algorithm is constructed. The response characteristics of new algorithm is much close to Hariharan algorithm, but is opposite in sign. Therefore, by the complementray correction of the two algorithms, the phase calculation error is reduced by two orders of magnitude. The capacity of fixed-step algorithm for linear phase shifting error control is improved greatly and there is no abnormal phase result coming out, which always appears in the calculation process by any equal step algotithm. The algorithm based on phase error complementary correction is much more compact for calculations, its feasibility and effectiveness are proved by the actual measurement experiment of a microsphere.
    Lu Binghui, Liu Guodong, Sun Heyi, Liu Bingguo, Chen Fengdong. Phase Extraction Method of Microsphere Interferometry Based on Error Complementary Correction[J]. Chinese Journal of Lasers, 2015, 42(5): 508004
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