Chuan Jin, Yu He, Yan Tang, Junbo Liu, Haifeng Sun, Song Hu. Spatial mismatch calibration method for simultaneous slightly off-axis digital holographic microscopy system[J]. Opto-Electronic Engineering, 2022, 49(9): 220047
- Opto-Electronic Engineering
- Vol. 49, Issue 9, 220047 (2022)
Fig. 1. Optical setup of the parallel phase-shifting SODHM system
Fig. 2. The generation principle of spatial relative position errors. (a) The longitudinal position error; (b) The transverse position error
Fig. 3. The position relationship of holograms
Fig. 4. The flow of proposed calibration method
Fig. 5. The whole flow of LDW-PSO algorithm
Fig. 6. Simulation input. (a) Simulated phase aberration; (b) Simulated π/2 phase shifting off-axis holograms without samples
Fig. 7. Simulation results. (a) RMSE convergence curve of phase distribution based on LDW-PSO; (b) The whole phase difference distribution after calibration using the method proposed in this paper; (c) The whole phase difference distribution after calibration using PPC method
Fig. 8. Holograms collected by the experimental system. (a) The off-axis hologram without sample; (b) The slightly off-axis holograms with sample
Fig. 9. Profile of the sample measured by the profilometer
Fig. 10. Experimental results. (a) The RMSE convergence curve of phase distribution based on LDW-PSO; (b) The entire phase difference distribution after calibration; (c) The phase distribution of reconstructed sample; (d) The outline of the white line marked in Figure 10(c)
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Table 1. Zernike polynomials of ZEMAX type and their coefficients in the simulation
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Table 2. Data comparison of relative position error
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Table 3. Experimental data of relative position error
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