• Journal of Infrared and Millimeter Waves
  • Vol. 36, Issue 1, 6 (2017)
YIN Jia-Yun*, LV Yuan-Jie, SONG Xu-Bo, TAN Xin, ZHANG Zhi-Rong, FANG Yu-Long, FENG Zhi-Hong, and CAI Shu-Jun
Author Affiliations
  • [in Chinese]
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    DOI: 10.11972/j.issn.1001-9014.2017.01.002 Cite this Article
    YIN Jia-Yun, LV Yuan-Jie, SONG Xu-Bo, TAN Xin, ZHANG Zhi-Rong, FANG Yu-Long, FENG Zhi-Hong, CAI Shu-Jun. fT=220 GHz InAlN/GaN HFETs with regrown ohmic contacts[J]. Journal of Infrared and Millimeter Waves, 2017, 36(1): 6 Copy Citation Text show less

    Abstract

    Scaled InAlN/GaN heterostructure field-effect transistors (HFETs) with high unity current gain cut-off frequency (fT) on sapphire substrate were fabricated and characterized. In this device, scaled source-to-drain distance (Lsd) of 600 nm was realized by metal organic chemical vapor deposition (MOCVD) based on regrow nonalloyed n+-GaN Ohmic contacts. Moreover, a 50 nm rectangular gate was fabricated by self-aligned-gate technology. A high drain saturation current density (Ids) of 2.11 A/mm @ Vgs= 1 V and a peak extrinsic transconductance (gm) of 609 mS/mm were achieved in the InAlN/GaN HFETs. In addition, from the small-signal RF measurements, the values of fT and maximum oscillation frequency (fmax) for the device with 50-nm rectangular gate were extrapolated to be 220 GHz and 48 GHz. To our best knowledge, the value of fT is the best reported one for InAlN/GaN HFETs in China.
    YIN Jia-Yun, LV Yuan-Jie, SONG Xu-Bo, TAN Xin, ZHANG Zhi-Rong, FANG Yu-Long, FENG Zhi-Hong, CAI Shu-Jun. fT=220 GHz InAlN/GaN HFETs with regrown ohmic contacts[J]. Journal of Infrared and Millimeter Waves, 2017, 36(1): 6
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