• Opto-Electronic Engineering
  • Vol. 43, Issue 7, 74 (2016)
ZHAO Xiaochen1、2、*, CAO Xuedong1, HU Mingpeng1, ZHANG Peng1, and ZHANG Lei1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3969/j.issn.1003-501x.2016.07.012 Cite this Article
    ZHAO Xiaochen, CAO Xuedong, HU Mingpeng, ZHANG Peng, ZHANG Lei. Research of Measuring Method for the Application in Super Smooth Mirror Scattering Measurement[J]. Opto-Electronic Engineering, 2016, 43(7): 74 Copy Citation Text show less
    References

    [1] HOU Haihong. Methods of scattering measurement on optical films [J]. Journal of Changshu Institute of Technology, 2008, 22(8):46-50.

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    [7] HOU Haihong, HONG Ruijin, ZHANG Dongping, et al. Total integrated scatterometer for measuring the micro roughness of optical thin films [J]. Chinese Journal of Lasers, 2005, 32(9):1258-1261.

    [8] SHEN Zhenfeng, GAO Jinsong, CHEN Hong, et al. Evaluation of performance of surface modification for silicon carbide mirror by self-made TIS scatterometer [J]. Optics and Precision Engineering, 2008, 16(10):1841-1846.

    [9] YU Hao. Mathematics model analysis of scattering method on measuring surface roughness [J]. Journal of Changchun University of Science and Technology, 2006, 29(1):109-112.

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    ZHAO Xiaochen, CAO Xuedong, HU Mingpeng, ZHANG Peng, ZHANG Lei. Research of Measuring Method for the Application in Super Smooth Mirror Scattering Measurement[J]. Opto-Electronic Engineering, 2016, 43(7): 74
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