• Acta Photonica Sinica
  • Vol. 48, Issue 12, 1211002 (2019)
Ying CUI1、1、3、3, Jun-hua HE1、1、*, Bing-jing WU1、1, Ya-dong YAN1、1, and Rui-hua XU1、1
Author Affiliations
  • 1Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an, 710119, China
  • 3College of Equipment Management and Support, Engineering University of PAP, Shaanxi, Xi'an, 710086, China
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    DOI: 10.3788/gzxb20194812.1211002 Cite this Article
    Ying CUI, Jun-hua HE, Bing-jing WU, Ya-dong YAN, Rui-hua XU. Design of X-ray Microscope Employing Toroid Mirrors Working at Grazing-incidence[J]. Acta Photonica Sinica, 2019, 48(12): 1211002 Copy Citation Text show less
    Schematic diagram of toroid mirror
    Fig. 1. Schematic diagram of toroid mirror
    Schematic diagram of X-ray imaging system
    Fig. 2. Schematic diagram of X-ray imaging system
    Reflective imaging diagram of double toroid mirrors
    Fig. 3. Reflective imaging diagram of double toroid mirrors
    Spot diagram on image plane
    Fig. 4. Spot diagram on image plane
    Longitudinal spherical aberration of single or two toroid mirrors
    Fig. 5. Longitudinal spherical aberration of single or two toroid mirrors
    The character of the two toroid mirrors
    Fig. 6. The character of the two toroid mirrors
    The influence of parameters on the performance of microscope
    Fig. 7. The influence of parameters on the performance of microscope
    Auxiliary adjustment system
    Fig. 8. Auxiliary adjustment system
    Schematic diagram of microscope aiming section
    Fig. 9. Schematic diagram of microscope aiming section
    Optical structure of binocular vision aiming system
    Fig. 10. Optical structure of binocular vision aiming system
    Image quality evaluation of binocular vision aiming system
    Fig. 11. Image quality evaluation of binocular vision aiming system
    Backlight image of a Ni mesh grid and resolution of the image
    Fig. 12. Backlight image of a Ni mesh grid and resolution of the image
    M1M2M3
    Translation along the X-axis200 μm200 μm500 μm
    Translation along the Y-axis50 μm50 μm50 μm
    Translation along the Z-axis200 μm200 μm1 000 μm
    Rotation around the X-axis0.01°0.01°0.01°
    Rotation around the Y-axis0.01°0.01°0.01°
    Rotation around the Z-axis0.1°0.1°0.1°
    Table 1. Positioning tolerances of each mirrors
    Ying CUI, Jun-hua HE, Bing-jing WU, Ya-dong YAN, Rui-hua XU. Design of X-ray Microscope Employing Toroid Mirrors Working at Grazing-incidence[J]. Acta Photonica Sinica, 2019, 48(12): 1211002
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