[1] Fadida S, Nyns L, van Elshocht S, Eizenberg M. J. Electron. Mater., 46, 386(2017).
[2] Wu H, Ye P D D. IEEE T. Electron Dev., 63, 3028(2016).
[3] Cheng B, Li C, Liu Z, Xue C. J. Semicond., 37, 1(2016).
[4] Mondal C, Biswas A. Superlattices Microstruct., 63, 277(2013).
[5] Kamata Y. Mater. Today, 11, 30(2008).
[11] Fossum J G, Zhang W M. IEEE T. Electron Dev., 50, 1042(2003).
[13] 王尘, Wang C, 许怡红, Xu Y H, Li C, 李成, 林海军, Lin H J[J]. Acta Phys. Sin., 66, 198502(2017).
[14] 王兴军, Wang X J, 苏昭棠, Su Z T, Zhou Z P, 周治平[J]. Sci. Sin.: Phys. Mech. Astron., 45, 014201(2015).
[15] Zhou Z W, He J K, Wang R C 2011
[16] Oye M M, Shahrjerdi D, Ok I, Hurst J B, Lewis S D, Dey S, Kelly D Q, Joshi S, Mattord T J, Yu X, Wistey M A, Harris Jr J S, Holmes Jr A L, Lee J C, Banerjee S K. J. Vac. Sci. Technol. B, 25, 1098(2007).
[18] Samavedam S B, Fitzgerald E A. J. Appl. Phys., 81, 3108(1997).
[20] Wang J Y, 汪建元, Wang C, 王尘, 李成, Li C, Chen S Y, 陈松岩[J]. Acta Phys. Sin., 64, 128102(2015).
[21] Lee K H, Bao S, Chong G Y, Tan Y H, Fitzgerald E A, Tan C S. APL Mater., 3, 362(2015).
[22] Wu P H, Huang Y S, Hsu H P, Li C, Huang S H, Tiong K K. Appl. Phys. Lett., 104, 943(2014).
[23] Yamamoto Y, Zaumseil P, Arguirov T, Kittler M, Tillack B. Solid State Electron., 60, 2(2011).
[24] Hartmann J M, Papon A M, Destefaniz V, Billon T. J. Cryst. Growth, 310, 5287(2008).
[26] 周志文, Zhou Z W, 沈晓霞, Shen X X, 李世国, Li S G[J]. Semiconductor Technology, 41, 133(2016).
[27] 周志文, Zhou Z W, 贺敬凯, He J K, Li C, 李成, Yu J Z, 余金中[J]. Journal of Optoelectronics · Laser, 22, 1030(2011).
[29] Chen D, Xue Z, Wei X, Wang G, Ye L, Zhang M, Wang D, Liu S. Appl. Surf. Sci., 299, 1(2014).
[30] Kasper E, Lyutovich K, Bauer M, Oehme M. Thin Solid Films, 336, 319(1998).
[32] Kasper E, Lyutovich K. Solid State Electron., 48, 1257(2004).
[33] Tersoff J. Phys. Rev. Lett., 56, 632(1986).
[34] Hahn K R, Puligheddu M, Colombo L. Phys. Rev. B, 91, 195313(2015).
[35] Ishimaru M, Yamaguchi M, Hirotsu Y. Phys. Rev. B, 68, 136(2003).
[36] Bording J K. Phys. Rev. B, 62, 7103(2000).
[37] Chen Z H, Yu Z Y, Lu P F, Liu Y M. Chin. Phys. B, 18, 4591(2009).
[38] Plimpton S. J. Comput. Phys., 117, 1(1995).
[39] Thompson A P, Plimpton S J, Mattson W. J. Chem. Phys., 131, 154107(2009).