Annealing effect on the properties of Mn-Co-Ni-O film detector

ZHANG Fei; OUYANG Cheng; ZHOU Wei; WU Jing; GAOYan-Qing; HUANG Zhi-Ming

doi:10.11972/j.issn.1001-9014.2016.03.007

[1] ZHANG Lei-Bo, HOU Yun, ZHOU Wei, et al. Investigation on optical properties of NiMn2O4 films by spectroscopic ellipsometry[J]. Solid State Commun., 2013, 159: 3235.

[2] DOBRZANSKI L, NOSSARZEWSKA-ORLOWSKA E, NOWAK Z, et al. Micro machined silicon bolometers as detectors of soft X-ray, ultraviolet, visible and infrared radiations[J]. Sensors and Actuators A, 1997, 60:154159.

[3] Chen C, Yi X, Zhao X, et al. Characterizations of VO2-based uncooled microbolometer linear array[J]. Sensors and Actuators A, 2001, 90: 212214.

[4] BALIGA S, ROST M, DOCTOR A. Sputtered film thermistor IR detectors[C], Proc. SPIE 2225, Infrared Detectors and Focal Plane Arrays III, 1994: 7278.

[5] ALMASRI M, BUTLER D P, CELIK-BUTLER Z. Self-supporting uncooled infrared micro bolometers with low thermal mass[J]. Journal of Micro electromechanical Systems, 2001, 10: 469476.

[6] GAO Yan-Qing, HUANG Zhi-Ming, HOU Yun, et al. Structural and electrical properties of Mn1.56Co0.96Ni0.48O4 NTC thermistor films[J]. Materials Science and Engineering B, 2014, 185:7478.

[7] LEI G H, CHEN H W, ZHENG S X, et al. Effects of RF magnetron sputtering power density on NTC characteristics of Mn-Co-Ni thin films[J]. J Mater Sci: Mater Electron, 2013, 24:12031207.

[8] PARK K, AM J. Fabrication and electrical properties of Mn-Ni-Co-Cu-Si oxides negative temperature coefficient thermistors[J]. Ceram.Soc.,2005, 88: 862866.

[10] ZHOU Wei, HOU Yun, GAO Yan Qing, et al. Experimental study on the responsivity enhancement of Mn1.56Co0.96Ni0.48O4 detector under moderate bias field[C].Proc. of SPIE Advances in Infrared Imaging and Applications, 2011, 8193: 81934G.

[11] SCHMIDT R, BASU A, BRINKMAN A W. Small polaron hopping in spinel manganates[J].Phys Rev B, 2005, 72: 115101.

[12] HE L, ZHANG G, LING Z Y, Improvement of structural and electrical properties of Mn-based thin film thermistors by a bilayer structure[J]. Mater.Lett.,2014, 128: 144147.

[13] DANNENBERG Rand, BALIGA S, GAMBINO R J,et al. Resistivity, thermopower and the correlation to infrared active vibrations of Mn1.56Co0.96Ni0.48O4 spinel films sputtered in an oxygen partial pressure series[J].Appl. Phys.,1999, 86(1): 514523.

[14] Zhou Wei, Xu X F, Ouyang Cheng, et al. Annealing effect on the structural, electrical and 1/f noise properties of Mn-Co-Ni-O thin films[J]. J Mater Sci: Mater Electron, 2014, 25:19591964.

[15] HOOGE F N. 1/F noise is no surface effect[J]. Phys Lett A,1969, A 29: 139&.

[16] ZHANG Fei, ZHOU Wei,OUYANG Cheng, et al. Annealing effect on the structural and electrical performance of Mn-Co-Ni-O films[J].AIP Advance, 2015, 5:117137.

[17] LISAUSKAS Alvydas, KHARTSEV S I, GRISHINA Alex. Tailoring the colossal magneto resistivity: La0.7(Pb0.63Sr0.37)0.3 MnO3 thin-film uncooled bolometer[J]. APPLIED PHYSICS LETTERS,2000, 77(5): 756758.