Measurement system for static and dynamic characterization of MEMS based on stroboscopic imaging

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 34 >Issue 2 >Page 27 > Article

Opto-Electronic Engineering
Vol. 34, Issue 2, 27 (2007)

Measurement system for static and dynamic characterization of MEMS based on stroboscopic imaging

[in Chinese]¹, [in Chinese]^2、3, [in Chinese]², [in Chinese]², and [in Chinese]²

Author Affiliations

¹[in Chinese]

²[in Chinese]

³[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement system for static and dynamic characterization of MEMS based on stroboscopic imaging[J]. Opto-Electronic Engineering, 2007, 34(2): 27 Copy Citation Text

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References

[2] Matthew R.HART,Robert A.CONANT,Kam Y.LAU,et al.Stroboscopic Interferometer System for Dynamic MEMS Characterization[J].Journal of Micro-electromechanical System,2000,9(4):409-408.

[3] Yuangang LU,Xiangzhao WANG,Guotian HE,et al.Phase unwrapping based on branch cut placing and reliability ordering[J].Optical Engineering,2005,44(5):055601-1-055601-9.

[5] C.REMBE,L.MULLER,R.S.MULLER,et al.Full three-dimensional motion characterization of a gimballed electrostatic microactuator[A].International Reliability Symposium[C].Orlando,Florida,USA:IEEE,2001.91-98.

[6] R CUSACK,J M HUNTLEY,H T GOLDREIN.Improved noise-immune phase-unwrapping algorithm[J].Applied Optics,1995,34(5):781-789.

[7] D J BONE.Fourier Fringe Analysis.the Two-dimensional Phase Unwrapping Problem[J].Applied Optics,1991,30(25):3627-3632.

[8] Peter L.KURCZYNSKI,Harold M.DYSON,Bernard SADOULET,et al.A membrane mirror with transparent electrode for adaptive optics[J].SPIE,2005,5719:155-166.

CLP Journals

[1] [in Chinese], [in Chinese], [in Chinese]. Active Visual System for Moving Object Intelligent Tracking Based on DSP[J]. Opto-Electronic Engineering, 2009, 36(2): 6

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