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    Journals >Opto-Electronic Engineering >Volume 34 >Issue 2 >Page 27 > Article
    • Opto-Electronic Engineering
    • Vol. 34, Issue 2, 27 (2007)
    Measurement system for static and dynamic characterization of MEMS based on stroboscopic imaging
    [in Chinese]1, [in Chinese]2、3, [in Chinese]2, [in Chinese]2, and [in Chinese]2
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  • 1[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement system for static and dynamic characterization of MEMS based on stroboscopic imaging[J]. Opto-Electronic Engineering, 2007, 34(2): 27 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement system for static and dynamic characterization of MEMS based on stroboscopic imaging[J]. Opto-Electronic Engineering, 2007, 34(2): 27
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