• Acta Optica Sinica
  • Vol. 18, Issue 11, 1523 (1998)
[in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Transmission of Refractive Microlens Array by Reactive Ion Beam Etching[J]. Acta Optica Sinica, 1998, 18(11): 1523 Copy Citation Text show less
    References

    [1] J. Jahns, K-H. Brenner, W. Daschner et al.. Replication of diffractive microoptical elements using a PMMA molding technique. Optik, 1992, 89(3): 98~103

    [2] A. Rogner, W. Ehrfeld. Fabrication of microstructures with high aspect ratios and great structural height by synchrotron radiation lithography, galvanoforming, and plastic molding (LIGA process). Microeletron. Engng., 1986, 4(1): 35~56

    [3] Sumio. Current status of the preparation of optical solids by the sol-get method. Proc. SPIE, 1992, 1758: 2~13

    [4] M. B. Stern, T. R. Jay. Dry etching for coherent refractive microlens arrays. Opt. Engng., 1994, 33(11): 3547~3551

    [5] D. L. Kendall, G. R. de Guet, S. Guel-Sadovel et al.. Chemically etched micromirrors in silicon. Appl. Phys. Lett., 1988, 52(10): 836~837

    [6] H. Jerominek, Jin Pan. Laser-assisted deposition and etching of silicon for fabrication of refractive and diffractive optical elements. Proc. SPIE, 1993, 2045: 194~204

    [7] N. T. Gordon, C. L. Jones, D. J. Purdy. Application of microlenses to infrared detector arrays. Infrared Phys., 1991, 31(6): 599~605

    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Transmission of Refractive Microlens Array by Reactive Ion Beam Etching[J]. Acta Optica Sinica, 1998, 18(11): 1523
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