Spectral Intensity Distribution of Oxygen Atom in a Plasma Plume

LI Xue-chen; JIA Peng-ying; YUAN Ning; YANG Bao-zhu

doi:10.3964/j.issn.1000-0593(2012)04-0890-03

Journals >Spectroscopy and Spectral Analysis >Volume 32 >Issue 4 >Page 890 > Article

Spectroscopy and Spectral Analysis
Vol. 32, Issue 4, 890 (2012)

Spectral Intensity Distribution of Oxygen Atom in a Plasma Plume

LI Xue-chen^*, JIA Peng-ying, YUAN Ning, and YANG Bao-zhu

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[in Chinese]

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DOI: 10.3964/j.issn.1000-0593(2012)04-0890-03 Cite this Article

LI Xue-chen, JIA Peng-ying, YUAN Ning, YANG Bao-zhu. Spectral Intensity Distribution of Oxygen Atom in a Plasma Plume[J]. Spectroscopy and Spectral Analysis, 2012, 32(4): 890 Copy Citation Text

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References

[1] Li X C, Jia P Y, Yuan N, et al. Phys. of Plasmas, 2011, 18: 043505.

[2] Li X C, Dong L F, Zhao N, et al. Appl. Phys. Lett., 2007,91: 161507.

[3] Staack D, Farouk B, Gutsol A, et al. Plasma Sources Sci. Technol., 2005, 14: 700.

[4] Machala Z, Laux C O, Kruger C H, IEEE Trans. on Plasma Sci., 2005, 33(2): 320.

[5] Machala Z, Jedlovsky I, Martisovits V. IEEE Trans. on Plasma Sci., 2008, 36(4): 918.

[6] Dong L F, Zhang Y Z, Liu W Y, et al. Appl. Phys. Lett., 2009, 94: 091502.

[7] Ono R, Oda T. J. Appl. Phys., 2003, 93(10): 5876.

[8] Li S Z, Huang W T, Zhang J L, et al. Appl. Phys. Lett., 2009, 94: 111501.

LI Xue-chen, JIA Peng-ying, YUAN Ning, YANG Bao-zhu. Spectral Intensity Distribution of Oxygen Atom in a Plasma Plume[J]. Spectroscopy and Spectral Analysis, 2012, 32(4): 890

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