Xiuhua FU, Yujun WEI, Zhaowen LIN, Yonggang PAN, Gang LI, Guangyuan FU. Thin-layer control error analysis and performance optimization of visible light anti-reflection film[J]. Optics and Precision Engineering, 2024, 32(1): 1

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- Optics and Precision Engineering
- Vol. 32, Issue 1, 1 (2024)

Fig. 1. Theoretical design of spectral curve of visible light anti-reflectance film

Fig. 2. Simulation results of effect of error on spectrum

Fig. 3. Effect of oxygen charging rate on performance of TiO2 material

Fig. 4. Effect of temperature and IBS parameters on TiO2

Fig. 5. Effect of substrate temperature on MgF2 film

Fig. 6. Deposition thickness analysis of TiO2 and SiO2 materials in evaporation rise stage

Fig. 7. Residual evaporation analysis of TiO2 and SiO2 materials

Fig. 8. Formula curves of film thickness error control model

Fig. 9. Comparison of spectral curves before and after using mathematical models

Fig. 10. Optimization of film thickness of sensitive layers

Fig. 11. Hardness test result

Fig. 12. Effect of IBS parameters on MgF2 film

Fig. 13. Result of boiling test

Fig. 14. Result of boiling test after adding SiO2 protective layer on outermost layer

Fig. 15. Repeatability test result
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Table 1. 实验计算得到的值

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