• Optics and Precision Engineering
  • Vol. 32, Issue 1, 1 (2024)
Xiuhua FU1,2, Yujun WEI1,2,*, Zhaowen LIN2,3, Yonggang PAN2,3..., Gang LI4 and Guangyuan FU1,2|Show fewer author(s)
Author Affiliations
  • 1College of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun30022, China
  • 2Zhongshan Research Institute, Changchun University of Science and Technology, Zhongshan58436,China
  • 3Zhongshan Jilian Optoelectronic Technology Co., Ltd., Zhongshan52846, China
  • 4Yunnan North Optical Technology Co. Ltd., Kunming650216, China
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    DOI: 10.37188/OPE.20243201.0001 Cite this Article
    Xiuhua FU, Yujun WEI, Zhaowen LIN, Yonggang PAN, Gang LI, Guangyuan FU. Thin-layer control error analysis and performance optimization of visible light anti-reflection film[J]. Optics and Precision Engineering, 2024, 32(1): 1 Copy Citation Text show less
    Theoretical design of spectral curve of visible light anti-reflectance film
    Fig. 1. Theoretical design of spectral curve of visible light anti-reflectance film
    Simulation results of effect of error on spectrum
    Fig. 2. Simulation results of effect of error on spectrum
    Effect of oxygen charging rate on performance of TiO2 material
    Fig. 3. Effect of oxygen charging rate on performance of TiO2 material
    Effect of temperature and IBS parameters on TiO2
    Fig. 4. Effect of temperature and IBS parameters on TiO2
    Effect of substrate temperature on MgF2 film
    Fig. 5. Effect of substrate temperature on MgF2 film
    Deposition thickness analysis of TiO2 and SiO2 materials in evaporation rise stage
    Fig. 6. Deposition thickness analysis of TiO2 and SiO2 materials in evaporation rise stage
    Residual evaporation analysis of TiO2 and SiO2 materials
    Fig. 7. Residual evaporation analysis of TiO2 and SiO2 materials
    Formula curves of film thickness error control model
    Fig. 8. Formula curves of film thickness error control model
    Comparison of spectral curves before and after using mathematical models
    Fig. 9. Comparison of spectral curves before and after using mathematical models
    Optimization of film thickness of sensitive layers
    Fig. 10. Optimization of film thickness of sensitive layers
    Hardness test result
    Fig. 11. Hardness test result
    Effect of IBS parameters on MgF2 film
    Fig. 12. Effect of IBS parameters on MgF2 film
    Result of boiling test
    Fig. 13. Result of boiling test
    Result of boiling test after adding SiO2 protective layer on outermost layer
    Fig. 14. Result of boiling test after adding SiO2 protective layer on outermost layer
    Repeatability test result
    Fig. 15. Repeatability test result
    Substrate materialTiO2(10 nm)SiO2(12 nm)
    K90.948 80.947 3
    500 nm SiO20.941 21.000 0
    300 nm TiO21.000 00.987 9
    Table 1. 实验计算得到的值
    Xiuhua FU, Yujun WEI, Zhaowen LIN, Yonggang PAN, Gang LI, Guangyuan FU. Thin-layer control error analysis and performance optimization of visible light anti-reflection film[J]. Optics and Precision Engineering, 2024, 32(1): 1
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