Researching

Journals
  • Advanced Photonics
  • Photonics Insights
  • Advanced Photonics Nexus
  • Photonics Research
  • Advanced Imaging
  • View All Journals
  • Chinese Optics Letters
  • High Power Laser Science and Engineering
    • Articles
  • Optics
  • Physics
  • Geography
  • View All Subjects
    • Conferences
  • CIOP
  • HPLSE
  • AP
  • View All Events
    • News
    About CLP
    Search by keywords or author
    Journals >Acta Optica Sinica >Volume 32 >Issue 6 >Page 607001 > Article
    • Acta Optica Sinica
    • Vol. 32, Issue 6, 607001 (2012)
    Theoretical Analysis of Photolithography Alignment and Calibration Method Based on Moiré Fringes
    Zhu Jiangping1、2、3、*, Hu Song1, Yu Junsheng2, Tang Yan1, and Zhou Shaolin1
    Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
    • show less
    DOI: 10.3788/aos201232.0607001 Cite this Article Set citation alerts
    Zhu Jiangping, Hu Song, Yu Junsheng, Tang Yan, Zhou Shaolin. Theoretical Analysis of Photolithography Alignment and Calibration Method Based on Moiré Fringes[J]. Acta Optica Sinica, 2012, 32(6): 607001 Copy Citation Text show less
    Cited By
    Article index updated: May. 19, 2024
    Citation counts are provided from Researching.
    The article is cited by 1 article(s) from Researching.
    Abstract
    Get PDF(in Chinese)
    Figures&Tables (0)
    Equations (0)
    References (10)
    Cited By (1)
    Get Citation
    Copy Citation Text
    Zhu Jiangping, Hu Song, Yu Junsheng, Tang Yan, Zhou Shaolin. Theoretical Analysis of Photolithography Alignment and Calibration Method Based on Moiré Fringes[J]. Acta Optica Sinica, 2012, 32(6): 607001
    Download Citation
    Set citation alerts for the article
    Tools
    Share
    Set citation alerts for the article
    Save the article for my favorites
    Paper Information
    Recommended Topics
    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology