Xiao CHEN, Jinyang KE, Zhongdi SHE, Jianguo ZHANG, Jianfeng XU. Optimization of process parameters and surface characteristics in laser-assisted ultra-precision cutting of monocrystalline silicon[J]. Optics and Precision Engineering, 2023, 31(1): 99
- Optics and Precision Engineering
- Vol. 31, Issue 1, 99 (2023)
Fig. 1. Laser in situ assisted ultra-precision cutting experimental devices
Fig. 2. Distribution of residual difference for surface roughness
Fig. 3. Main effect diagram for mean value of surface roughness signal-to-noise ratio
Fig. 4. Monocrystalline silicon aspheric lens with diameter of 165 nm machined by in situ laser assisted ultra-precision machining
Fig. 5. Micrographs of diamond tool
Fig. 6. Residual stress on machined surface of monocrystalline silicon
Fig. 7. Surface charateristics of silicon machine by laser assisted ultra-precision cutting
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Table 1. Processing factors and level of orthogonal test
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Table 2. 正交表与加工表面粗糙度结果
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Table 3. Variance of surface roughness in orthogonal test
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