YANG JIAN, WU SHUDONG, WANG ZHIJIANG. Determination of spatial linewidth with partially coherent imagery[J]. Acta Optica Sinica, 1984, 4(12): 1067
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In this paper, the straight-edge-threshold in an axis-symmetrical imaging system is deduced based on the theory of partial coherence, and the effect of the scanning slit width is also considered. An experimental method is discussed with a π phase edge plate. The comparison of the calculated value and the threshold shows a good agreement. The location accuracy reaches to 0.01μm.