Optimization of measurement configuration in optical scatterometry for one-dimensional nanostructures based on sensitivity analysis

DONG Zheng-Qiong; LIU Shi-Yuan; CHEN Xiu-Guo*; SHI Ya-Ting; ZHANG Chuan-Wei; JIANG Hao

doi:10.11972/j.issn.1001-9014.2016.01.019

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