DONG Zheng-Qiong, LIU Shi-Yuan, CHEN Xiu-Guo*, SHI Ya-Ting, ZHANG Chuan-Wei, JIANG Hao. Optimization of measurement configuration in optical scatterometry for one-dimensional nanostructures based on sensitivity analysis[J]. Journal of Infrared and Millimeter Waves, 2016, 35(1): 116