Researching

Journals
  • Advanced Photonics
  • Photonics Insights
  • Advanced Photonics Nexus
  • Photonics Research
  • Advanced Imaging
  • View All Journals
  • Chinese Optics Letters
  • High Power Laser Science and Engineering
    • Articles
  • Optics
  • Physics
  • Geography
  • View All Subjects
    • Conferences
  • CIOP
  • HPLSE
  • AP
  • View All Events
    • News
    About CLP
    Search by keywords or author
    Journals >Opto-Electronic Engineering >Volume 33 >Issue 1 >Page 1 > Article
    • Opto-Electronic Engineering
    • Vol. 33, Issue 1, 1 (2006)
    Imaging interferometric lithography with bidirection biased illumination
    [in Chinese]1, [in Chinese]1, and [in Chinese]1、2
    Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
    • show less
    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese]. Imaging interferometric lithography with bidirection biased illumination[J]. Opto-Electronic Engineering, 2006, 33(1): 1 Copy Citation Text show less
    References

    [5] Xiaolan CHEN,S.R.J.BRUECK.Imaging interferometric lithography for arbitrary patterns[J].SPIE Proceedings,1997,3331:214-224.

    [6] S.R.J.BRUECK.Imaging interferometric lithography[J].Microlithography World,1998,Winter:2-10.

    CLP Journals

    [1] [in Chinese], [in Chinese]. System error modification[J]. Opto-Electronic Engineering, 2007, 34(12): 1

    [2] TIAN Xiaomin, LIU Dong, XU Jiwei, WANG Zhenzhu, WANG Bangxin, WU Decheng, ZHONG Zhiqing, XIE Chenbo, WANG Yingjian. Review of Lidar Technology for Atmosphere Monitoring[J]. Journal of Atmospheric and Environmental Optics, 2018, 13(5): 321

    [3] Shi Guohua, Rao Xuejun, Ding Zhihua, Zhang Yudong, Jiang Wenhan. Distance Measurement of Optical Surface Based on Optical Coherence Tomography[J]. Chinese Journal of Lasers, 2009, 36(s2): 210

    [4] XIAO Ling, LIU Dong, WANG Yingjian, WANG Zhenzhu, XIE Chenbo. Survey on Self-Aligning Method for Atmospheric Monitoring Lidar System[J]. Journal of Atmospheric and Environmental Optics, 2016, 11(3): 161

    [5] ZHENG Wei, GUO Lili, ZHAO Longfei, LIANG Zeng, HAO Dongmei. Registration of SPECT Image and B-type Ultrasound Image Based on Artificial Bee Colony Algorithm[J]. Opto-Electronic Engineering, 2014, 41(8): 51

    [6] Tan Ying, Wu Xiaying, Peng Xinzhong, Yi Fan. Implementation of Self-Aligning System with a Single Click for the Lidar[J]. Chinese Journal of Lasers, 2011, 38(s1): 114005

    [7] TAN Kun, SHAO Shi-sheng. A Self-alignment System of a Mobile Lidar[J]. Journal of Atmospheric and Environmental Optics, 2008, 3(5): 344

    [8] Li Xiaofeng, Xu Jun, Luo Jijun, Cao Lijia, Zhang Shengxiu, Zhang Ying. Sequential Detection of Targets in Laser Active Imaging System[J]. Chinese Journal of Lasers, 2011, 38(9): 908007

    [9] CHEN Bing, ZHAO Yi-gong, LI Xin. A New Approach to Target Tracking during Infrared Image Terminal Guidance[J]. Acta Photonica Sinica, 2009, 38(11): 3034

    Abstract
    Get PDF
    Figures&Tables (0)
    Equations (0)
    References (2)
    Get Citation
    Copy Citation Text
    [in Chinese], [in Chinese], [in Chinese]. Imaging interferometric lithography with bidirection biased illumination[J]. Opto-Electronic Engineering, 2006, 33(1): 1
    Download Citation
    Tools
    Share
    Save the article for my favorites
    Paper Information
    Recommended Topics
    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology