Fabrication of SiGe Rib Waveguides X Branches

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 15 >Issue 2 >Page 252 > Article

Acta Optica Sinica
Vol. 15, Issue 2, 252 (1995)

Fabrication of SiGe Rib Waveguides X Branches

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of SiGe Rib Waveguides X Branches[J]. Acta Optica Sinica, 1995, 15(2): 252 Copy Citation Text

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Abstract

Based on the realization of low loss Si1-xGex/Si single-mode rib waveguides,we developed the Si1-xGex/Si "X" branches with the cross waveguides. These structures were fabricated from SiGe grown by molecular beam epitaxy (MBE). The branchesdemensions are determined by Si1-xGex/Si large single-mode conditions and propagationfeatures of the "X" cross waveguides using the beam propagstion and effective indexmethod.

Keywords

branches rib waveguide Si_1-xGe_x/Si hetero-junction

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of SiGe Rib Waveguides X Branches[J]. Acta Optica Sinica, 1995, 15(2): 252

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