Design and Fabrication of 2-Dimension Laser Scanner Using Diffractive Optical Elements

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 19 >Issue 2 >Page 254 > Article

Acta Optica Sinica
Vol. 19, Issue 2, 254 (1999)

Design and Fabrication of 2-Dimension Laser Scanner Using Diffractive Optical Elements

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and Fabrication of 2-Dimension Laser Scanner Using Diffractive Optical Elements[J]. Acta Optica Sinica, 1999, 19(2): 254 Copy Citation Text

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Abstract

A new kind of diffractive 2-dimension laser scanner is proposed, designed and fabricated using laser direct writing (LDW) and reactive ion etched (RIE). The scanner is tested and the parameters of the 25×25 degrees scanning range and 41% diffractive efficiency are obtained.

Keywords

binary optics diffractive optics laser scanning

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