The relationship between different matrix of fixed abrasive pad(FAP) and the polishing performance of K9 glass is studied under the same chemical mechanical polishing process parameters. Swelling ratio and pencil hardness are selected to evaluate the matrix properties of FAP, and material removal rate (MRR) and 3D-profile surface roughness (Sa) are selected to evaluate machining performance of FAP. The results show that the swelling rate and the pencil hardness of the two substrates together influence the performance of the MRR and surface roughness of the sample. With increasing the swelling rate of matrix, the MRR of sample reduces, and the surface roughness of sample increases; with the increase of wet pencil hardness of the sample, the MRR will also increase accordingly, while the surface roughness of sample based on a value of the swelling rate increases at first and then decreases, and hydrophilic FAP can stand long-time steady processing, which demonstrates the self-conditioning capabilities.