• Infrared and Laser Engineering
  • Vol. 49, Issue 2, 213002 (2020)
Lei Lihua1、2、*, Zhang Xinyin1、2, Wu Junjie1, Li Zhiwei1, Li Qiang3, Liu Na1, Xie Zhangning2, Guan Yuqing2, and Fu Yunxia1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • show less
    DOI: 10.3788/irla202049.0213002 Cite this Article
    Lei Lihua, Zhang Xinyin, Wu Junjie, Li Zhiwei, Li Qiang, Liu Na, Xie Zhangning, Guan Yuqing, Fu Yunxia. Characterization of nanofilm parameters based on hybrid optimization algorithm[J]. Infrared and Laser Engineering, 2020, 49(2): 213002 Copy Citation Text show less
    References

    [1] Wilkening G, Koenders L. Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro and Nanometer Range[M]. Berlin: Wiley VCH, 2005.

    [2] Foozieh S, Seyedeh M. Optical detection of brain activity using plasmonic ellipsometry technique[J]. Sensors & Amp; Actuators: B Chemical, 2017, 251(12): 56-61.

    [3] Mangesh D, Kyunam P, Jihun M, et al. Characterization of wafer-scale MoS2 and WSe2 2D films by spectroscopic ellipsometry[J]. Current Applied Physics, 2017, 17(10): 66-72.

    [4] Petr J, Stanislav S, Karel P, et al. Spectroscopic ellipsometry characterization of spinc-oated Ge25S75 chalcogenide thin films[J]. Pure and Applied Chemistry, 2017, 89(4): 85-92.

    [5] Wu J J, Ding G Q, Chen X, et al. Nano step height measurement using an optical method[J]. Sensors and Actuators: A, 2017, 257: 92-97.

    [6] Jindal S, Bulusu S. A transferable artificial neural network model for atomic forces innanoparticles[J]. The Journal of Chemical Physics, 2018, 149(19): 22-31.

    [7] Dai G, Pohlenz F, Xu M, et al. Accurate and traceable measurement of nano and microstructures[J]. Measurement Science & Technology, 2006, 17(3): 545-552.

    [8] Tong G, Tao H, Shu A, et al. Ellipsometric study on optical properties of hydrogen plasma-treated aluminum-doped ZnO thin film[J]. Vacuum, 2019, 163(2): 37-42.

    [9] Michihata M, Takaya Y, Hayashi T. Nano position sensing based on laser trapping technique for flat surfaces[J]. Measurement Science and Technology, 2008, 19(8): 080413-1-7.

    Lei Lihua, Zhang Xinyin, Wu Junjie, Li Zhiwei, Li Qiang, Liu Na, Xie Zhangning, Guan Yuqing, Fu Yunxia. Characterization of nanofilm parameters based on hybrid optimization algorithm[J]. Infrared and Laser Engineering, 2020, 49(2): 213002
    Download Citation