Microstructure Surface Topography Measurement Based on Color Images of White Light Interferometry

Guo Tong; Li Feng; Ni Lianfeng; Chen Jinping; Fu Xing; Hu Xiaotang

doi:10.3788/aos201434.0212003

[1] Fangyu Peng, Jing Wu, Zhenglong Fang, et al.. Modeling and controlling of surface micro-topography feature in micro-ball-end milling [J]. Int J Advanced Manufacturing Technology, 2013, 67(9-12): 2657-2670.

[2] Lior Kogut. The influence of surface topography on the electromechanical characteristics of parallel-plate MEMS capacitors [J]. J Micromechanics and Microengineering, 2005, 15(5): 1068-1075.

[3] A B Yu, A Q Liu, Q X Zhang, et al.. Effects of surface roughness on electromagnetic characteristics of capacitive switches [J]. J Micromechanics and Microengineering, 2006, 16(10): 2157-2166.

[4] Roya Maboudian. Surface processes in MEMS technology [J]. Surface Science Reports, 1998, 30(6-8): 207-269.

[5] Conor O′Mahony, Martin Hill, Magali Brunet, et al.. Characterization of micromechanical structures using white-light interferometry [J]. Meas Sci & Technol, 2003, 14(10): 1807-1814.

[6] David Grigg, Eric Felkel, John Roth, et al.. Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy [C]. SPIE, 2004, 5455: 429-435.

[7] R Dandliker, E Zimmermann, G Frosio. Electronically scanned white-light interferometry: a novel noise-resistant signal processing [J]. Opt Lett, 1992, 17(9): 679-681.

[8] Min-Cheol Park, Seung-Woo Kim. Direct quadratic polynomial fitting for fringe peak detection of white light scanning interferograms [J]. Opt Eng, 2000, 39(4): 952-959.

[9] Qian Kemao. Two-dimensional windowed Fourier transform for fringe pattern analysis: Principles, applications and implementations[J]. Opt & Lasers in Eng, 2007, 45(2): 304-317.

[10] S Ma, C Quan, R Zhu, et al.. Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry [J]. Opt Commun, 2011, 284(10-11): 2488-2493.

[11] Matthew Hart, David G Vass, Mark L Begbie. Fast surface profiling by spectral analysis of white-light interferograms with Fourier transform spectroscopy [J]. Appl Opt, 1998, 37(10):1764-1769.

[12] Patrick Sandoz. Wavelet transform as a processing tool in white-light interferometry [J]. Opt Lett, 1997, 22(14): 1065-1067.

[13] Rolf-Jürgen Recknagel, Gunther Notni. Analysis of white light interferograms using wavelet methods [J]. Opt Commun, 1998, 148(1-3): 122-128.

[14] Zehra Sarac, Ali Dursun, Sündüs Yerdelen. Wavelet phase evaluation of white light interferograms [J]. Meas Sci & Technol, 2005, 16(9): 1878-1882.

[15] Tong Guo, Hong Chang, Jinping Chen, et al.. Micro-motion analyzer used for dynamic MEMS characterization [J]. Opt & Lasers in Eng, 2009, 47(3-4): 512-517.

[16] Guo Tong, Hu Chunguang, Chen Jinping, et al.. Temporal phase-shifting microscopic interferometry for geometrical characterization of MEMS devices [J]. Nanotechnology and Precision Engineering, 2008, 6(1): 44-49.

[17] Dai Meiling, Yang Fujun, Geng Min, et al.. Single color fringe projection for measuring three-dimensional shapes with discontinuities [J]. Acta Optica Sinica, 2012, 32(4): 0412005.

[18] Liu Di, Yao Zhenning, Li Haifeng, et al.. Structured light acquisition system based on waveband separation [J]. Acta Optica Sinica, 2012, 32(6): 0612003.

[19] Michal E Pawlowski, Youhei Sakano, Yoko Miyamoto, et al.. Phase-crossing algorithm for white-light fringes analysis [J]. Opt Commun, 2006, 260(1): 68-72.

[20] Suodong Ma, Chenggen Quan, Rihong Zhu, et al.. Surface profile measurement in white-light scanning interferometry using a three-chip color CCD [J]. Appl Opt, 2011, 50(15): 2246-2254.

[21] Zdeněk Buchta, Petr Jedlika, Milan Matějka, et al.. White-light fringe analysis with low-cost CCD camera [C]. 6th International Workshop on Advanced Optical Metrology, 2009. 149-152.

[22] Z Buchta, B Mikel, J Lazar, et al.. White-light fringe detection based on a novel light source and colour CCD camera [J]. Meas Sci & Technol, 2011, 22(9): 094031.

[23] Andreas Koschan, Mongi Abidi. Digital Color Image Processing [M]. Zhang Yujin Transl. Beijing: Tsinghua University Press, 2010.

[24] Peter de Groot, Xavier Colonna de Lega. Signal modeling for low-coherence height-scanning interference microscopy [J]. Appl Opt, 2004, 43(25): 4821-4830.

[25] Cheng Zhengxin, Yang Shouzhi, Feng Xiaoxia. Wavelet Analysis of Theory, Algorithm, Progress and Application [M]. Beijing: Press of National Defense Industry, 2007.

[26] Akiko Harasaki, James C Wyant. Fringe modulation skewing effect in white-light vertical scanning interferometry [J]. Appl Opt, 2000, 39(13): 2101-2106.

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