• Acta Photonica Sinica
  • Vol. 50, Issue 11, 1131001 (2021)
Liangsheng XIAO1, Runze QI2、3、*, Bo LAI2、3, Qiushi HUANG2、3, Jiali WU2、3, Yue YU2、3, and Zihua XIN1、*
Author Affiliations
  • 1Department of Physics,Shanghai University,Shanghai 200444,China
  • 2Institute of Precision Optical Engineering,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China
  • 3MOE Key Laboratory of Advanced Micro-Structured Materials,Shanghai 200092,China
  • show less
    DOI: 10.3788/gzxb20215011.1131001 Cite this Article
    Liangsheng XIAO, Runze QI, Bo LAI, Qiushi HUANG, Jiali WU, Yue YU, Zihua XIN. Study on the Structure and Reflectivity of Yb/Al Multilayers Prepared by Different Base Pressure[J]. Acta Photonica Sinica, 2021, 50(11): 1131001 Copy Citation Text show less
    References

    [1] V DOMINGO, B FLECK, A I POLAND. SOHO: the solar and heliospheric observatory. Space Science Reviews, 72, 81-84(1995).

    [2] M L KAISER, T A KUCERA, J M DAVILA et al. The STEREO mission: An introduction. Space Science Reviews, 136, 5-16(2008).

    [3] W D PESNELL, B J THOMPSON, P C CHAMBERLIN. The solar dynamics observatory (SDO). The Solar Dynamics Observatory, 3-15(2011).

    [4] E MARSCH, R MARSDEN, R HARRISON et al. Solar Orbiter-mission profile, main goals and present status. Advances in Space Research, 36, 1360-1366(2005).

    [5] M ZUKIC, D G TORR. Multiple reflectors as narrow-band and broadband vacuum ultraviolet filters. Applied Optics, 31, 1588-1596(1992).

    [6] M ZUKIC, D G TORR, J KIM et al. Filters for the international solar terrestrial physics mission far-ultraviolet imager. Optical Engineering, 32, 3069-3074(1993).

    [7] A GATTO, R THIELSCH, J HEBER et al. High-performance deep-ultraviolet optics for free-electron lasers. Applied Optics, 41, 3236-3241(2002).

    [8] Y A USPENSKII, V E LEVASHOV, A V VINOGRADOV et al. High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35–50 nm. Optics Letters, 23, 771-773(1998).

    [9] S A YULIN, F SCHAEFERS, T FEIGL et al. Enhanced reflectivity and stability of Sc/Si multilayers, 5193, 155-163(2004).

    [10] J GAUTIER, F DELMOTTE, F BRIDOU et al. Characterization and optimization of magnetron sputtered Sc/Si Multilayers for Extreme Ultraviolet Optics. Applied Physics A, 88, 719-725(2007).

    [11] H TAKENAKA, S ICHIMARU, T OHCHI et al. Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer. Journal of Electronspectroscopy and Related Phenomena, 144, 1047-1049(2005).

    [12] D S MARTÍNEZ-GALARCE, P BOERNER, R SOUFLI et al. The high-resolution lightweight telescope for the EUV (HiLiTE), 7011-70113K(2008).

    [13] D L WINDT, J F SEELY, B KJORNRATTANAWANICH et al. Terbium-based extreme ultraviolet multilayers. Optics Letters, 30, 3186-3188(2005).

    [14] B KJORNRATTANAWANICH, D L WINDT, J F SEELY et al. SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging. Applied Optics, 45, 1765-1772(2006).

    [15] B KJORNRATTANAWANICH, D L WINDT, J F SEELY. Normal-incidence silicon–gadolinium multilayers for imaging at 63 nm wavelength. Optics Letters, 33, 965-967(2008).

    [16] B KJORNRATTANAWANICH, D L WINDT, Y A USPENSKII et al. Optical constants determination of neodymium and gadolinium in the 3-to 100-nm wavelength range, 6317, 63170U(2006).

    [17] M VIDAL-DASILVA, M FERNÁNDEZ-PEREA, J A MÉNDEZ et al. Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm. Optics Express, 17, 22773-22784(2009).

    [18] D L WINDT. IMD—Software for modeling the optical properties of multilayer films. Computers in Physics, 12, 360-370(1998).

    [19] A D RAKIĆ. Algorithm for the determination of intrinsic optical constants of metal films: application to aluminum. Applied Optics, 34, 4755-4767(1995).

    [20] J I LARRUQUERT, J A AZNÁREZ, J A MÉNDEZ et al. Optical properties of ytterbium films in the far and the extreme ultraviolet. Applied Optics, 42, 4566-4572(2003).

    [21] M FERNÁNDEZ-PEREA, J I LARRUQUERT, J A AZNÁREZ et al. Optical constants of Yb films in the 23-1700 eV range. Journal of the Optical Society of America A, 24, 3691-3699(2007).

    [22] J I LARRUQUERT, A P PÉREZ-MARÍN, S GARCÍA-CORTÉS et al. Self-consistent optical constants of SiC thin films. Journal of the Optical Society of America A, 28, 2340-2345(2011).

    [23] Zhanshan WANG. Effect of film thickness errors on performance of soft X-ray multilayer. Optics and Precision Engineering, 11, 136-138(2003).

    [24] Fengli WANG, Zhanshan WANG, Zhong ZHANG et al. Study on W/B4C, W/C, W/Si multilayers. Optics and Precision Engineering, 13, 28-33(2005).

    [25] M ULMEANU, A SERGHEI, I N MIHAILESCU et al. C-Ni amorphous multilayers studied by atomic force microscopy. Applied Surface Science, 165, 109-115(2000).

    [26] L L SHAW, D GOBERMAN, R REN et al. The dependency of microstructure and properties of nanostructured coatings on plasma spray conditions. Surface and Coatings Technology, 130, 1-8(2000).

    [27] C MITTERER, F HOLLER, F ÜSTEL et al. Application of hard coatings in aluminum die casting—soldering, erosion and thermal fatigue behavior. Surface and Coatings Technology, 125, 233-239(2000).

    [28] Maojin DONG, Tao CHEN, Jizhou WANG et al. Effect of vacuum degree on optical and structural properties of TiO2 thin films. Vacuum and Low Temperature, 16, 233-237(2010).

    [29] M WEN, S MA, Q HUANG et al. Effect of background pressure on Co/C multilayers. Applied Optics, 56, C16-C20(2017).

    [30] D XU, Q HUANG, M WEN et al. Structure, thermal stability and extreme ultraviolet performance of Mo/Y multilayers. Thin Solid Films, 592, 266-270(2015).

    [31] S M PEYMANI-MOTLAGH, A SOBHANI-NASAB, M ROSTAMI et al. Assessing the magnetic, cytotoxic and photocatalytic influence of incorporating Yb 3+ or Pr 3+ ions in cobalt–nickel ferrite. Journal of Materials Science: Materials in Electronics, 30, 6902-6909(2019).

    [32] D A PERMIN, A V NOVIKOVA, V A KOSHKIN et al. Fabrication and magneto-optical properties of Yb2O3 based ceramics. Magnetochemistry, 6, 63(2020).

    [33] A KAHRAMAN, H KARACALI, E YILMAZ. Impact and origin of the oxide-interface traps in Al/Yb2O3/n-Si/Al on the electrical characteristics. Journal of Alloys and Compounds, 825, 154171(2020).

    [34] L HAO, G HE, Z FANG et al. Modulation of the microstructure, optical and electrical properties of sputtering-driven Yb2O3 gate dielectrics by sputtering power and annealing treatment. Applied Surface Science, 508, 145273(2020).

    [35] Q ZHONG, W LI, Z ZHANG et al. Optical and structural performance of the Al (1% wtSi)/Zr reflection multilayers in the 17–19nm region. Optics Express, 20, 10692-10700(2012).

    [36] Y LIU, Q HUANG, R QI et al. Improvement of the Microstructure and X-ray Performance of Ultrathin Ru/C Multilayer Mirror after High Temperature Treatment. Coatings, 11, 45(2021).

    [37] Yonggang WU, Erhua CAO, Zhanshan WANG et al. Preparation and characterization of free-standing molybdenum filter for X-ray laser. Optical Instruments, 23, 144-148(2001).

    [38] J ZHU, B JI, H JIANG et al. Spectral purity Al/Yb/Al filter for vacuum ultraviolet at 50 to 100 nm. Optical Engineering, 59, 055108(2020).

    [39] J H HALFORD, F K CHIN, J E NORMAN. Effects of vacuum deposition conditions on ellipsometric parameters, optical constants, and reflectance of ultrapure aluminum films. Journal of the Optical Society of America, 63, 786-792(1973).

    [40] D GAROLI, F FRASSETTO, G MONACO et al. Reflectance measurements and optical constants in the extreme ultraviolet-vacuum ultraviolet regions for SiC with a different C/Si ratio. Applied Optics, 45, 5642-5650(2006).

    [41] J I LARRUQUERT, R A M KESKI-KUHA. Reflectance measurements and optical constants in the extreme ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb and of evaporated Cr. Applied Optics, 39, 2772-2781(2000).

    [42] F BRIDOU, M CUNIOT-PONSARD, J M DESVIGNES et al. Experimental determination of optical constants of MgF2 and AlF3 thin films in the vacuum ultra-violet wavelength region (60–124 nm), and its application to optical designs. Optics Communications, 283, 1351-1358(2010).

    Liangsheng XIAO, Runze QI, Bo LAI, Qiushi HUANG, Jiali WU, Yue YU, Zihua XIN. Study on the Structure and Reflectivity of Yb/Al Multilayers Prepared by Different Base Pressure[J]. Acta Photonica Sinica, 2021, 50(11): 1131001
    Download Citation