Liangsheng XIAO, Runze QI, Bo LAI, Qiushi HUANG, Jiali WU, Yue YU, Zihua XIN. Study on the Structure and Reflectivity of Yb/Al Multilayers Prepared by Different Base Pressure[J]. Acta Photonica Sinica, 2021, 50(11): 1131001
- Acta Photonica Sinica
- Vol. 50, Issue 11, 1131001 (2021)
Fig. 1. GIXRR measured and fitting curves of Yb/Al multilayer prepared under different base pressure conditions
Fig. 2. Average interfacial widths of Yb and Al under different base pressure
Fig. 3. AFM images of Yb/Al multilayer from 2×10-4 Pa to 4×10-5 Pa，and RMS roughness of Yb/Al multilayer surface
Fig. 4. PSD of Yb/Al multilayer surfaces
Fig. 5. XRD diffraction spectrum of Yb/Al multilayers prepared under different base pressures
Fig. 6. The stress of Yb/Al multilayers as a function of the base pressure
Fig. 7. Reflectivity of Yb/Al multilayer under 4×10-5 Pa
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Table 1. Structural parameters of Yb/Al multilayers prepared under different base pressure
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