[1] Armand Neukermans, Rajiv Ramaswami. MEMS technology for optical networking applications. IEEE Communications Magazine, January 2001. 62～69

[2] Giles C R, Aksyuk V, Barber B et al.. A silicon MEMS optical switch attenuator and its use in lightwave subsystems. IEEE J. Selected Topics in Quant. Electron., 1999, 5(1):18～25

[4] Cao Zhonghui, Yuan Ye, Bao Junfeng et al.. A micromechanical variable optical attenuator based on EDM micromachining. Proc. SPIE, 2002, 4928:225～227

[5] Takahata K, Gianchandani Y B. Batch mode micro-electro-discharge matching. J. Microelectromech. Syst., 2002, 11(2):102～110