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    Journals >Acta Optica Sinica >Volume 31 >Issue 12 >Page 1222005 > Article
    • Acta Optica Sinica
    • Vol. 31, Issue 12, 1222005 (2011)
    Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer
    Zheng Ying1、2、*, Liang Zhongzhu1, and Liang Jingqiu1
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201131.1222005 Cite this Article Set citation alerts
    Zheng Ying, Liang Zhongzhu, Liang Jingqiu. Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer[J]. Acta Optica Sinica, 2011, 31(12): 1222005 Copy Citation Text show less
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    Zheng Ying, Liang Zhongzhu, Liang Jingqiu. Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer[J]. Acta Optica Sinica, 2011, 31(12): 1222005
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