Ang Li, Yanqiu Li, Pengzhi Wei, Miao Yuan, Chengcheng Wang. High-Precision Measurement Method of Polarization Aberrations for Large Numerical Aperture (NA=0.55) Variable-Magnification Extreme Ultraviolet Lithography Projection Objective[J]. Acta Optica Sinica, 2022, 42(23): 2312001

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- Acta Optica Sinica
- Vol. 42, Issue 23, 2312001 (2022)
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