Liu Ke, Li Yanqiu. A New Calibration Method of Systematic Errors in Phase-Shifting Point Diffraction Interferometer[J]. Acta Optica Sinica, 2010, 30(10): 2923
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Liu Ke, Li Yanqiu. A New Calibration Method of Systematic Errors in Phase-Shifting Point Diffraction Interferometer[J]. Acta Optica Sinica, 2010, 30(10): 2923