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Journals >
Acta Photonica Sinica >
Volume 49 >
Issue 8 >
Page 0831002 > Article
Acta Photonica Sinica
Vol. 49, Issue 8, 0831002 (2020)
Study on Properties of Fluorine-oxide Composite Films
Yun-yun SHI, Jun-qi XU, and Jun-hong SU
Author Affiliations
Shaanxi Province Thin Films Technology and Optical Test Open Key Laboratory, Xi'an Technological University, Xi'an 710021, China
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DOI:
10.3788/gzxb20204908.0831002
Cite this Article
Yun-yun SHI, Jun-qi XU, Jun-hong SU. Study on Properties of Fluorine-oxide Composite Films[J]. Acta Photonica Sinica, 2020, 49(8): 0831002
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Fig. 1.
The refractive index and extinction coefficient curve of the films
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Fig. 2.
The transmittance spectral curves of the thin films
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Fig. 3.
The three-dimensional pattern of the thin films
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Fig. 4.
The AFM images of the single-component and composite thin films
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Fig. 5.
Laser-induced damage threshold of the thin films
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Fig. 6.
The laser damage morphology of the thin films
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Filmogen
Evaporation method
Electron beam current/mA Resistance current/A
Substrate temperature/℃
Base pressure /Pa
Working pressure/Pa
Oxygen flow rate/sccm
SiO
2
Electron beam
40
180
3.0×10
-3
1.3×10
-2
1.9
YF
3
Resistance
150
180
3.0×10
-3
7.3×10
-3
/
TiO
2
Electron beam
100
180
3.0×10
-3
2.8×10
-2
3.2
Table 1.
Preparation process parameters
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Samples
Thickness/nm
Power/nm
Stress/GPa
Substrate
/
-0.173
/
SiO
2
307.5
-255.937
-0.4
YF
3
308.1
255.224
0.4
TiO
2
281.4
1 520.499
3.9
SiO
2
/YF
3
306.2
1 162.851
1.9
TiO
2
/YF
3
285.5
459.022
0.8
Table 2.
The mechanical parameters of the thin films
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Abstract
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Figures&Tables (8)
Equations (2)
References (20)
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Yun-yun SHI, Jun-qi XU, Jun-hong SU. Study on Properties of Fluorine-oxide Composite Films[J]. Acta Photonica Sinica, 2020, 49(8): 0831002
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Paper Information
Category: Thin Films
Received: Mar. 1, 2020
Accepted: Jun. 1, 2020
Published Online: Aug. 25, 2020
The Author Email:
DOI:
10.3788/gzxb20204908.0831002
Recommended Topics
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