• Acta Photonica Sinica
  • Vol. 49, Issue 8, 0831002 (2020)
Yun-yun SHI, Jun-qi XU, and Jun-hong SU
Author Affiliations
  • Shaanxi Province Thin Films Technology and Optical Test Open Key Laboratory, Xi'an Technological University, Xi'an 710021, China
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    DOI: 10.3788/gzxb20204908.0831002 Cite this Article
    Yun-yun SHI, Jun-qi XU, Jun-hong SU. Study on Properties of Fluorine-oxide Composite Films[J]. Acta Photonica Sinica, 2020, 49(8): 0831002 Copy Citation Text show less
    The refractive index and extinction coefficient curve of the films
    Fig. 1. The refractive index and extinction coefficient curve of the films
    The transmittance spectral curves of the thin films
    Fig. 2. The transmittance spectral curves of the thin films
    The three-dimensional pattern of the thin films
    Fig. 3. The three-dimensional pattern of the thin films
    The AFM images of the single-component and composite thin films
    Fig. 4. The AFM images of the single-component and composite thin films
    Laser-induced damage threshold of the thin films
    Fig. 5. Laser-induced damage threshold of the thin films
    The laser damage morphology of the thin films
    Fig. 6. The laser damage morphology of the thin films
    FilmogenEvaporation methodElectron beam current/mA Resistance current/ASubstrate temperature/℃Base pressure /PaWorking pressure/PaOxygen flow rate/sccm
    SiO2Electron beam401803.0×10-31.3×10-21.9
    YF3Resistance1501803.0×10-37.3×10-3/
    TiO2Electron beam1001803.0×10-32.8×10-23.2
    Table 1. Preparation process parameters
    SamplesThickness/nmPower/nmStress/GPa
    Substrate/-0.173/
    SiO2307.5-255.937-0.4
    YF3308.1255.2240.4
    TiO2281.41 520.4993.9
    SiO2/YF3306.21 162.8511.9
    TiO2/YF3285.5459.0220.8
    Table 2. The mechanical parameters of the thin films
    Yun-yun SHI, Jun-qi XU, Jun-hong SU. Study on Properties of Fluorine-oxide Composite Films[J]. Acta Photonica Sinica, 2020, 49(8): 0831002
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