SiO₂/YF₃ and TiO₂/YF₃ composite films were prepared by SiO₂, YF₃, TiO₂ single-component materials respectively, the changes of optical, mechanical and laser damage resistance properties of the composite films were explored. Two kinds of fluorine-oxide composite films with a mixing molar ratio of 1:1 were prepared by controlling the deposition rate of the materials during evaporation through dual-source co-evaporation technique, the refractive index, extinction coefficient, transmission characteristics, surface morphology and roughness of the composite films were investigated, and laser damage resistance performance was studied. The results show that the refractive indexes of SiO₂/YF₃ and TiO₂/YF₃ composite films are 1.478 7 and 1.864 6(wavelength 550 nm) respectively, which are between the single-component materials(YF₃ 1.493 6, SiO₂ 1.465 1, TiO₂ 2.048 3), and all present normal dispersion distribution; the results of ZYGO interference measurement show that the stress value of SiO₂/YF₃ film is 1.9 GPa, which is larger than the 0.4 GPa of the single-component materials SiO₂ and YF₃ but less roughness; the stress value of TiO₂/YF₃ film is 0.8 GPa, which is smaller than the 3.9 GPa stress of TiO₂ but larger than YF₃, both of them show a more obvious stress adjustment effect. The laser-induced damage threshold of SiO₂/YF₃ composite film is 9.2 J/cm², which is 2.2% higher than single-component SiO₂ and 39.2% higher than YF₃; the laser-induced damage threshold of TiO₂/YF₃ is 7.8 J/cm², for the single-component TiO₂ film, it increases by 85.6%, compared with YF₃ by 17.4%. The fluorine-oxide composite films are deposited by dual-source co-evaporation technology with small absorption and adjustable film refractive index; SiO₂/YF₃ and TiO₂/YF₃ composite films are better than single-component materials in resisting laser damage; the doping of YF₃ can significantly reduce the stress of the single TiO₂ material, but the stress of SiO₂/YF₃ is larger than that of single-component SiO₂ and YF₃ films.