[2] Churenkov A V. Silicon micromechanical optical waveguide for sensing and modulation. Sensors and Actuators, 1996, A57(1):21～27

[4] Venkatech S, Culshaw B. Optically activated vibrations in a micromachined silicon structure. Electron. Lett., 1985, 21(8):315～317

[5] Hoummady M, Farnault F, Kawakatsu H et al.. Applications of dynamic techniques for accurate determination of silicon Nitride Young′s moduli. Proc. of International Conference on Solid-State Sensors and Actuators. Chicago, Jun 16～19, 1997: 615～618

[8] Thornton K E B, Uttamchandani D, Culshaw B. Novel optical excited resonant pressure sensors. Electron. Lett., 1988, 24(10): 573～574

[9] Stokes N A D, Fatch R M A, Venkatesh S. Self-excited vibration of optical microresonator. Electron. Lett., 1988, 24(12):777～778

[10] Ericson F, Greek S, Soderkvist J et al.. High-sensitivity surface micromachined structures for intenal stress and stress gradient evaluation. J. Mincromech. Microeng., 1997, 7(1):30～36

[11] Rao Y J, Culshaw B. Comparison between optically excited vibration of silicon cantilever and bridge microresonators. Sensors and Actuators, 1992, A30(3):203～208

[12] Wolfelscheider H, Kist R, Knoll G et al.. Optically excited and intergrated micomechanical silicon cantilever structure. Proc. SPIE, 1987, 798:61～66

[13] Fatch R M A. Mechanisms of optical activations of micromechanical resonators. Sensors and Actuators, 1992, A33(3):229～236