[1] MacDougal M, Geske J, Wang C, et al. Low dark current InGaAs detector arrays for night vision and astronomy[J]. SPIE, 2009, 7298:72983F-1-72983F-10.
[4] Cohen M J, Lange M J, Ettenberg M H, et al. A thin film indium gallium arsenide focal plane array for visible and near infrared hyperspectral imaging[C]. LEOS, 1999: 744-745.
[5] Fatemi N’ S . The achievement of near-theoretical-minimum contact resistance to InP[J]. J Appl. Phys, 1993, 74(11):6740-6746.
[6] Hasenberg T C, Garmire E. An improved Au/Be contact to p-type InP[J]. J Appl. Phys, 1987, 61(2): 808-809.
[7] Baca A G, Ren F,Zolper J C,et al. A survey of ohmic contacts to III-V compound semiconductors[J]. Thin Solid Films, 1997, 308309:599-606.
[9] Yu A Y C. Electron tunneling and contact resistance of metal-silicon contact barriers[J], Solid-State electronics, 1970, 13: 239-247.
[10] Weizer V G, Fatemi N S. Contact spreading and the Au3In to Au9In transition in the Au-InP system [J]. J Appl. Phys, 1990, 68(5): 2275-2284.