Design of an A-type Upper Electrode MEMS Single Pole Three Throw Switch in the L-E Band

NING Chaodong; ZHAN Yongxin; WU Qiannan; WANG Junqiang; LI Mengwei

doi:10.13911/j.cnki.1004-3365.220230

[4] LI M, ZHANG Y, ZHAO Y, et al. Design and fabrication of a 4-bit RF MEMS attenuator with a high attenuation accuracy ［J］. Analog Integrated Circuits and Signal Processing, 2020, 102(7): 617-624.

[6] ZHANG N B, MEI L R, WANG C T, et al. A switchable bandpass filter employing RF MEMS switches and open-ring resonators ［J］. IEEE Trans Elec Dev, 2017, 64(1): 1-7.

[7] LU D, YU M, BARKER N S, et al. A simple and general method for filtering power divider with frequency fixed and frequency-tunable fully canonical filtering response demonstrations ［J］. IEEE Transactions on Microwave Theory and Techniques, 2019, 67(5): 1812-1825.

[9] DEY S, KOUL S K, PODDAR A K, et al. Reliable and compact 3- and 4-bit phase shifters using MEMS SP4T and SP8T switches ［J］. Journal of Microelectro- mechanical Systems, 2018, 27(1): 113-124.

[11] DEY S, KOUL S K, PODDAR A K, et al. 17-30 GHz reliable and compact analog phase shifter using lateral micromachined SP7T switches, and DMTL arrays ［J］. Progress In Electromagnetics Research C, 2021, 116(1): 157-169.

[12] DEMIREL K, YAZGAN E, DEMIR S, et al. A new temperature-tolerant RF MEMS switch structure design and fabrication for Ka-band applications ［J］. Journal of Microelectromechanical Systems, 2016, 25(1): 60-68.

[13] LI M W, LIU Q H, WU Q N, et al. Broadband radio frequency MEMS series contact switch with low insertion loss ［J］. Microsystem Technologies, 2019, 25(5): 1619-1625.