Research on the Electron Temperature and Emission Spectroscopy of the Atmospheric Inductively Coupled with Plasma Processing

XIN Qiang; ZHANG Peng; LI Na; WANG Bo

doi:10.3964/j.issn.1000-0593(2016)06-1872-05

Journals >Spectroscopy and Spectral Analysis >Volume 36 >Issue 6 >Page 1872 > Article

Spectroscopy and Spectral Analysis
Vol. 36, Issue 6, 1872 (2016)

Research on the Electron Temperature and Emission Spectroscopy of the Atmospheric Inductively Coupled with Plasma Processing

XIN Qiang, ZHANG Peng, LI Na, and WANG Bo

Author Affiliations

[in Chinese]

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DOI: 10.3964/j.issn.1000-0593(2016)06-1872-05 Cite this Article

XIN Qiang, ZHANG Peng, LI Na, WANG Bo. Research on the Electron Temperature and Emission Spectroscopy of the Atmospheric Inductively Coupled with Plasma Processing[J]. Spectroscopy and Spectral Analysis, 2016, 36(6): 1872 Copy Citation Text

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