Projection Type Micro-Optical Encoder Based on MEMS Technology

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 23 >Issue 8 >Page 1005 > Article

Acta Optica Sinica
Vol. 23, Issue 8, 1005 (2003)

Projection Type Micro-Optical Encoder Based on MEMS Technology

[in Chinese]^1、*, [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese]. Projection Type Micro-Optical Encoder Based on MEMS Technology[J]. Acta Optica Sinica, 2003, 23(8): 1005 Copy Citation Text

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References

[1] Pattigrew R M. Analysys of grating imaging and its application to displacement metrogy. Proc. SPIE, 1977, 136:325～332

[3] Hane K, Grover C P. Imaging with rectangular transmission grating. J. Opt. Soc. Am. (A), 1987, 4(4):706～711

[4] Hane K, Grover C P. Magnified grating images used in displacement sensing.Appl. Opt., 1987, 26(14):2355～2359

[in Chinese], [in Chinese], [in Chinese]. Projection Type Micro-Optical Encoder Based on MEMS Technology[J]. Acta Optica Sinica, 2003, 23(8): 1005

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