Phase shifter is the important part of the phase shifting interferometer. For its high resolution, rapid response and easy operation, the piezoelectric phase shifter is widely used. Due to the non linear error and micro-displacement, its application is limited. The structure of piezoelectric shifter and its expansion methods are studied, and the flexible hinge phase shifter with magnifying characteristics is designed. Based on single neural proportional sum derivative (PSD) algorithm, adaptive real-time control is implemented which enhances the performance of the piezoelectric phase shifter by improving the nonlinear performance and depressing the interference of environment. Three piezoelectric ceramics are used in the piezoelectric phase shifter which can be used in the 100 mm aperture lens with 30 μm displacement. The result verifies this method with a precision of 0.01 μm.