• Chinese Physics B
  • Vol. 29, Issue 8, (2020)
Yao-Peng Zhao, Chong Wang, Xue-Feng Zheng, Xiao-Hua Ma, Kai Liu, Ang Li, Yun-Long He, and Yue Hao
Author Affiliations
  • Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi’an 710071, China
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    DOI: 10.1088/1674-1056/ab8daa Cite this Article
    Yao-Peng Zhao, Chong Wang, Xue-Feng Zheng, Xiao-Hua Ma, Kai Liu, Ang Li, Yun-Long He, Yue Hao. Comparative study on characteristics of Si-based AlGaN/GaN recessed MIS-HEMTs with HfO2 and Al2O3 gate insulators[J]. Chinese Physics B, 2020, 29(8): Copy Citation Text show less
    References

    [1] M Y Hua, J Wei, S Krishnamoorthy, Q L Bao, Z F Zhang, Z Y Zheng, J Chen Kevin. IEEE T. Electron. Dev, 39, 413(2018).

    [2] I Nifa, C Leroux, A Torres, M Charles, G Reimbold, G Ghibaudo, E Bano. Microelectron. Eng, 215(2019).

    [3] X X Fei, Y Wang, X Luo, F Cao, C H Yu. Superlattice Microst, 114, 314(2018).

    [4] F Garcia, S Shamsir, S K Islam. Solid-State Electron, 151, 52(2019).

    [5] Y J Shi, S Huang, Q L Bao, X H Wang, K Wei, H J Jiang, J F Li, C Zhao, S M Li, Y Zhou, H W Gao, Q Sun, H Yang, J H Zhang, W J Chen, Q Zhou, B Zhang, X Y Liu. IEEE T. Electron. Dev, 63, 614(2016).

    [6] H Y Wang, J Y Wang, M J Li, Q R Cao, M Yu, Y D He, W G Wu. IEEE Electron Dev. Lett, 39, 1888(2018).

    [7] S Liu, Y Cai, G Gu, J Wang, C Zeng, W Shi, Z Feng, H Qin, Z Cheng, K J Chen, B Zhang. IEEE Electron Dev. Lett, 33, 354(2012).

    [8] J B He, M Y Hua, Z F Zhang, J K Chen. IEEE T. Electron. Dev, 65, 3185(2018).

    [9] T Hashizume, K Nishiguchi, S Kaneki, J Kuzmik, Z Yatabe. Mater. Sci. Semicond. Proc, 78, 85(2018).

    [10] R D Long, C M Jackson, J Yang, A Hazeghi, C Hitzman, S Majety, A R Arehart, Y Nishi, T P Ma, S A Ringel, P C Mclntyre. Appl. Phys. Lett, 103(2013).

    [11] C Liu, E F Chor, L S Tan. Appl. Phys. Lett, 88(2006).

    [12] M Kanamura, T Ohki, T Kikkawa, K Imanishi, T Imada, A Yamada, N Hara. IEEE Electron Dev. Lett, 31, 189(2010).

    [13] S Huang, S Yang, J Roberts, K J Chen. Jpn. J. Appl. Phys, 50(2011).

    [14] W Choi, O Seok, H Ryu, H Cha, K Seo. IEEE Electron Dev. Lett, 35, 175(2014).

    [15] Y P Zhao, C Wang, X F Zheng, X H Ma, Y L He, K Liu, A Li, Y Peng, C F Zhang, Y Hao. Phys. Status Solidi A, 217(2020).

    [16] M Tapajna, J Kuzmik. Appl. Phys. Lett, 100(2012).

    [17] B Y Chou, W C Hsu, H Y Liu, C S Ho, C S Lee. Semicond. Sci. Technol, 28(2013).

    [18] Y J Yoon, H S Kang, J H Seo, Y J Kim, J H Bae, J H Lee, I M Kang, S J Cho. J. Korean Phys. Soc, 65, 1579(2014).

    [19] Y P Zhao, C Wang, X F Zheng, X H Ma, Y L He, K Liu, A Li, Y Peng, C F Zhang, Y Hao. Solid-State Electron, 163(2020).

    [20] J J Zhu, X H Ma, Y Xie, B Hou, W W Chen, J C Zhang, Y Hao. IEEE T. Electron. Dev, 62, 512(2015).

    [21] Y L He, H Gao, C Wang, Y P Zhao, X L Lu, C F Zhang, X F Zheng, L X Guo, X H Ma, Y Hao. Phys. Status Solidi A, 216(2019).

    Yao-Peng Zhao, Chong Wang, Xue-Feng Zheng, Xiao-Hua Ma, Kai Liu, Ang Li, Yun-Long He, Yue Hao. Comparative study on characteristics of Si-based AlGaN/GaN recessed MIS-HEMTs with HfO2 and Al2O3 gate insulators[J]. Chinese Physics B, 2020, 29(8):
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