Diamond-like Carbon (DLC) films prepared by electron beam evaporation deposition were irradiated with a Nd:YAG pulsed laser, operating at different wavelengths(λ=355 nm, 532 nm, 1 064 nm). Different methods including optical microscope, optical profiler and Raman spectrometer were employed for analyzing the films. The results show that the damage threshold energy density for DLC film flashed by a single laser pulse of different wavelengths is different, and the damage threshold for DLC film flashed by the multipulses laser of same wavelengths is lower. DLC films are modified after laser irradiation. The profile of the irradiated surface shows swelling and crater, resulting from superposition of three laser-induced processes-graphitization, spallation and evaporation. Swelling height and crater depth were determined by laser energy density and the number of laser pulses.